EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
SUBSIDIARY | JURISDICTION OF INCORPORATION |
|
|
Beijing Newport Spectra-Physics Technologies Co., Ltd. | China |
Electro Scientific Industries Europe Ltd | United Kingdom |
Electro Scientific Industries GmbH | Germany |
Electro Scientific Industries Singapore Pte. Ltd. | Singapore |
Electro Scientific Industries, Inc. | Oregon |
Eolite Systems SAS | France |
ESI China, Inc. | Oregon |
ESI Electronic Equipment (Shanghai) Co., Ltd. | China |
ESI International Corporation | Oregon |
ESI Japan, K.K. | Japan |
ESI Korea, Inc. | Korea |
ESI Vietnam Company Limited | Vietnam |
High Q Laser GmbH | Austria |
Micro-Controle Spectra-Physics S.A.S. | France |
MKS Denmark ApS | Denmark |
MKS German Holding GmbH | Germany |
MKS Instruments (China) Company Ltd. | China |
MKS Instruments (Hong Kong) Limited | Hong Kong |
MKS Instruments (Singapore) Pte. Ltd. | Singapore |
MKS Instruments Deutschland GmbH | Germany |
MKS Instruments ESI Switzerland GmbH | Switzerland |
MKS Instruments Holdings Ltd | United Kingdom |
MKS Instruments Israel Ltd. | Israel |
MKS Instruments Italy S.r.l. | Italy |
MKS Instruments Mexico S. de R.L. de C.V. | Mexico |
MKS Instruments UK Limited | United Kingdom |
MKS Spectra Holdings Limited | United Kingdom |
MKS Japan, Inc. | Japan |
MKS Korea Ltd. | Korea |
MKS Taiwan Technology Limited | Taiwan |
Newport Corporation | Nevada |
Newport Instruments Canada Corporation | Canada |
Newport Laser Holding GmbH | Austria |
Newport Ophir Holdings Ltd. | Israel |
Newport Opto-Electronics Technologies (Korea) LLC | Korea |
Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. | Singapore |
Newport Opto-Electronics Technologies (Wuxi) Company Limited | China |
Newport Spectra-Physics B.V. | Netherlands |
Newport Spectra-Physics GmbH | Germany |
Newport Spectra-Physics Limited | United Kingdom |
Ophir Japan Ltd. | Japan |
Ophir Optics S.R.L. | Romania |
Ophir Optronics GmbH | Germany |
Ophir Optronics Ltd. | Israel |
Ophir Optronics Solutions Ltd. | Israel |
Ophir Spiricon Europe GmbH | Germany |
Ophir-Spiricon, LLC | Utah |
Spectra-Physics, K.K. | Japan |
V-Gen Ltd. | Israel |