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Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name |
| Jurisdiction in which incorporated |
Bruce Technologies, Inc |
| State of Massachusetts |
|
|
|
Bruce Technologies Europe GmbH |
| Federal Republic of Germany |
|
|
|
BTU Europe Ltd. |
| State of Delaware |
|
|
|
BTU International, Inc. |
| State of Delaware |
|
|
|
BTU Ltd. (Shanghai) |
| State of Delaware |
|
|
|
BTU Overseas, Ltd. |
| State of Delaware |
|
|
|
BTU Overseas (Shanghai) Co., Ltd |
| State of Delaware |
|
|
|
P.R. Hoffman Machine Products, Inc |
| State of Arizona |
|
|
|
R2D Automation SAS |
| France |
|
|
|
Amtech Tempress New Energy Technologies Limited |
| China |
|
|
|
Kunshan Amtech Tempress Machinery Equipment Co., Ltd. |
| China |
|
|
|
Tempress Asia Holding BV |
| The Netherlands |
|
|
|
Tempress Engineering BV |
| The Netherlands |
|
|
|
Tempress Group Holding BV |
| The Netherlands |
|
|
|
Tempress Holdings BV |
| The Netherlands |
|
|
|
Tempress Hong Kong Limited |
| Hong Kong |
|
|
|
Tempress IP BV |
| The Netherlands |
|
|
|
Tempress Manufacturing BV |
| The Netherlands |
|
|
|
Tempress Onroerend Goed BV |
| The Netherlands |
|
|
|
Tempress PV-Park BV |
| The Netherlands |
|
|
|
Tempress Systems, Inc. |
| State of Texas |
|
|
|
Tempress Systems BV |
| The Netherlands |
|
|
|
|
|
|