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New words:
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Removed:
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Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name |
| Jurisdiction in which incorporated |
Bruce Technologies, Inc |
| State of Massachusetts |
|
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|
BTU Europe Ltd. |
| State of Delaware |
|
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BTU International, Inc. |
| State of Delaware |
|
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BTU Ltd. (Shanghai) |
| State of Delaware |
|
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BTU Overseas, Ltd. |
| State of Delaware |
|
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BTU Overseas (Shanghai) Co., Ltd |
| State of Delaware |
|
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P.R. Hoffman Machine Products, Inc |
| State of Arizona |
|
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Tempress Systems, Inc. |
| State of Texas |