5 patents
Utility
Wafer inspection system including a laser triangulation sensor
14 Feb 23
One example of an inspection system includes a laser, a magnification changer, and a first camera.
John Schaefer, Christopher Voges, Nicholas Smith, Jeffrey Treptau
Filed: 8 Jun 18
Utility
Wafer singulation process control
26 Apr 22
A method for monitoring and controlling a substrate singulation process is described.
Wayne Fitzgerald
Filed: 23 Dec 16
Utility
Substrate handling and identification mechanism
25 May 20
A structure and method for employing the structure to reliably read indicia formed on a substrate such as a panel or wafer is disclosed.
Kevin Barr
Filed: 20 Dec 17
Utility
Inspection of substrates
3 Feb 20
Concepts presented herein relate to approaches for performing substrate inspection.
Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
Filed: 21 Mar 18
Utility
Semiconductor device inspection of metallic discontinuities
4 Nov 19
Concepts presented herein relate to approaches for performing substrate inspection.
Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
Filed: 21 Mar 18
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