3 patents
Utility
Corrosion-resistant Components
13 Jan 22
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 μm, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer.
Matthew Simpson, Ramesh Divakar, Alan Filer
Filed: 22 Jul 21
Utility
Coating Methods and Materials to Reduce Aging of Sic Hot Surface Ignitors
21 Jan 21
An ignitor that includes at least one layer of silicon dioxide coating a silicon carbide material, methods of making and using the ignitor, and a kit that includes the ignitor are provided.
Michael J. Hanagan, Al Marshall
Filed: 14 Jul 20
Utility
Destructible Sealing Disk and Methods Associated Therewith
30 Oct 19
A drill piping or tubing pressure seal includes a diameter-spanning body portion.
Patrick Stone
Filed: 22 Apr 19
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