538 patents
Utility
Monoalkylation of Cyclopentadiene
18 Jan 24
The disclosure provides an improved method for preparing monoalkylated cyclopentadiene species in high yield and selectivity.
Scott A. Laneman, Vagulejan Balasanthiran, Smita Patnaik, Victoria Weidner
Filed: 11 Jul 23
Utility
Process for Preparing Phosphonate Esters
18 Jan 24
Provided is a process for the preparation of certain bisphosphonate compounds and their ester derivatives.
Adrian Houghton, Scott A. Laneman
Filed: 7 Jul 23
Design
Bag holding tray
16 Jan 24
Nicholas Coscia
Filed: 19 Mar 21
Utility
Formulations to selectively etch silicon-germanium relative to silicon
16 Jan 24
Compositions useful for the selective removal by etching of silicon-germanium-containing materials relative to silicon-containing materials, from a microelectronic device having features containing these materials at a surface, the compositions containing hydrofluoric acid, acetic acid, hydrogen peroxide, and at least one additional acid that will improve performance as measured by one or more of an etching rate or selectivity and are tunable to achieve the required Si:Ge removal selectivity and etch rates.
Steven M. Bilodeau
Filed: 11 Apr 18
Utility
Automatable closure
9 Jan 24
A cap for a fluid container includes a main body, an actuator ring slidable along the main body and having an annular groove, and a plurality of latches having secure and release states and that may be placed in the release state by contact with the actuator ring.
Gregory Bores
Filed: 15 Mar 22
Utility
Substrate container valve assemblies
9 Jan 24
A substrate container includes a container portion having an open side or bottom, and a door to sealingly close the open side or bottom, one of the door and the container portion defining access structure.
Matthew A Fuller, Mark V. Smith, Jeffery J. King, John Burns
Filed: 28 May 20
Utility
Vibration Fill Process for Solid Chemistries
4 Jan 24
A system including a vessel for containing a fill material and a vibration source connected to the vessel.
Benjamin H. Olson, Dalton Vance Locklear, Bryan C. Hendrix, Jacob Thomas, Aniket Joshi, Scott L. Battle, Benjamin Cardozo, Benjamin R. Garrett, Juan Valdez, Michael Watson
Filed: 26 Jun 23
Utility
Composite Nanoporous Metal Membrane
4 Jan 24
A composite nanoporous metal membrane, a method of making same, and a method of using same to filter supercritical CO2 are provided.
Robert ZELLER
Filed: 13 Sep 23
Utility
Compounds and Processes for Extreme Ultraviolet Lithography
4 Jan 24
The present disclosure includes the preparation of mixed-ligand compounds, such as tin(II) cyclopentadienylide complexes.
David M. Ermert, Thomas M. Cameron
Filed: 29 Jun 23
Utility
De-powdering of Green Samples Using Freezing Method for Additive Manufacturing
28 Dec 23
A method for producing an article and a system associated with the method are provided.
Thines Kumar Perumal, Subhash Guddati, Aravind Vasanthakumar, Montray Leavy, Rocky Dean Gipson, Edward A. Sturm
Filed: 27 Jun 23
Utility
Modules for Delivery Systems and Related Methods
28 Dec 23
A system including a chemical supply cabinet (e.g., such as a chemical supply cabinet configured to contain an ampoule), a module configured to modify a surface, and a control unit connected to the module, wherein the control unit is configured to direct the modifying of the surface.
Bryan C. Hendrix, Carlo Waldfried, Scott L. Battle, Gavin Richards, Benjamin R. Garrett
Filed: 28 Jun 23
Utility
Inserts for Spacing In Reticle Containers
28 Dec 23
Spacers include a base configured to be placed within depressions of one of a cover or a baseplate of a reticle pod, and a contact surface configured to contact the other of the cover and the baseplate.
Russ V. Raschke, Brian Wiseman, Paul J. Magoon, Huaping Wang
Filed: 20 Jun 23
Utility
Methods and Systems for Adsorbing Organometallic Vapor
21 Dec 23
Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
Charles H. Applegarth, Rocky D. Gipson, Sarah Vogt, Joshua T. Cook, Matthew Browning, Marco Holzner
Filed: 31 Jul 23
Utility
Method for Etching Polysilicon
21 Dec 23
The invention provides compositions useful in the etching of polysilicon in the presence of silicon oxide and silicon nitride.
Steven M. Bilodeau, Daniela White
Filed: 16 Jun 23
Utility
Purging Gas Amplifier
21 Dec 23
A container includes a deflector, disposed in an interior of a substrate container, having a longitudinal opening and a deflection surface and a gas distributor configured to provide a purging gas to purge an interior of a substrate container.
Matthew A. Fuller, Aleksandr A. Yakuba, Mark V. Smith
Filed: 16 Jun 23
Utility
Filter Module
21 Dec 23
A filter module includes an interface body and a filter retention body.
Matthew A. Fuller, Colton J. Harr
Filed: 23 May 23
Utility
Compositions and methods for post-CMP cleaning of cobalt substrates
19 Dec 23
A cleaning composition is disclosed for cleaning residue and/or contaminants from microelectronic devices having same thereon.
Daniela White, Donald Frye, Elizabeth Thomas, Jun Liu, Michael White
Filed: 25 Nov 19
Utility
Cleaning Composition with Molybdenum Etching Inhibitor
14 Dec 23
The present disclosure relates to removal compositions for at least partially removing post-chemical mechanical polishing (post-CMP) residues from the surface of a microelectronic device.
Daniela White, Michael L. White, YoungMin Kim, Akshay Rajopadhye, Atanu K. Das
Filed: 8 Jun 23
Utility
CMP composition for polishing hard materials
12 Dec 23
A slurry for chemical mechanical polishing (CMP) includes an aqueous liquid carrier, an oxygen and anion containing transition metal compound or polyatomic cations including a transition metal and oxygen or hydrogen, and a per-based oxidizer.
Rajiv K. Singh, Sunny De, Deepika Singh, Chaitanya Dnyanesh Ginde, Aditya Dilip Verma
Filed: 30 Jan 21
Utility
Devices for Cleaning Substrates and Related Methods
7 Dec 23
A device for cleaning substrates.
Subhash Guddati, Hyungjun Kim, Aravind Vasanthakumar, Thines Kumar Perumal, Montray Leavy
Filed: 2 Jun 23