78 patents
Utility
Dual source injector with switchable analyzing magnet
21 Nov 23
An ion implantation system has a mass analyzing magnet having interior and exterior region and defining a first entrance, second entrance, and an exit.
Wilhelm Platow, Neil Bassom
Filed: 28 Mar 22
Utility
Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride As a Source Material to Generate an Aluminum Ion Beam
2 Nov 23
An ion implantation system, ion source, and method are provided having a gaseous aluminum-based ion source material.
Neil K. Colvin, Neil Bassom, Edward Moore
Filed: 30 Jun 23
Utility
Hydraulic Feed System for an Ion Source
26 Oct 23
An ion source has an arc chamber defining an arc chamber volume.
Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
Filed: 16 Jun 23
Utility
Extended lifetime dual indirectly-heated cathode ion source
24 Oct 23
An ion source has an arc chamber with a first end and a second end.
Wilhelm Platow, Neil Bassom, Jonathan David
Filed: 30 Sep 21
Utility
Dual Source Injector with Switchable Analyzing Magnet
28 Sep 23
An ion implantation system has a mass analyzing magnet having interior and exterior region and defining a first entrance, second entrance, and an exit.
Wilhelm Platow, Neil Bassom
Filed: 28 Mar 22
Utility
System and method for extending a lifetime of an ion source for molecular carbon implants
12 Sep 23
An ion source assembly and method has a source gas supply to provide a molecular carbon source gas to an ion source chamber.
David Sporleder, Neil Bassom, Neil K. Colvin, Mike Ameen, Xiao Xu
Filed: 29 May 20
Utility
Hydraulic feed system for an ion source
15 Aug 23
An ion source has an arc chamber defining an arc chamber volume.
Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
Filed: 31 Jan 22
Utility
Method for decreasing cool down time with heated system for semiconductor manufacturing equipment
15 Aug 23
A system, method, and apparatus for heating and cooling a component in chamber enclosing a chamber volume.
John Baggett, Joseph Ferrara
Filed: 21 Dec 18
Utility
Hydraulic Feed System for an Ion Source
3 Aug 23
An ion source has an arc chamber defining an arc chamber volume.
Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
Filed: 31 Jan 22
Utility
High Incidence Angle Graphite for Particle Control with Dedicated Low Sputter Yield Ion Beam
27 Jul 23
An ion source for an ion implantation system is configured to form an ion beam from a predetermined species along a beamline, where the ion beam is at an initial energy.
David M. Burtner, Neil J. Bassom
Filed: 20 Dec 22
Utility
Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam
11 Jul 23
An ion implantation system, ion source, and method are provided, where an ion source is configured to ionize an aluminum-based ion source material and to form an ion beam and a by-product including a non-conducting material.
Neil K. Colvin, Neil Bassom, Xiao Xu
Filed: 4 Jun 21
Utility
Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam
11 Jul 23
An ion implantation system, ion source, and method are provided having a gaseous aluminum-based ion source material.
Neil K. Colvin, Neil Bassom, Edward Moore
Filed: 29 Oct 21
Utility
Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control
9 May 23
An ion implantation has an ion source and a mass analyzer configured to form and mass analyze an ion beam.
James DeLuca, Andy Ray, Neil Demario, Rosario Mollica
Filed: 14 Feb 20
Utility
Charge Filter Magnet with Variable Achromaticity
4 May 23
An ion implantation system has an ion source to generate an ion beam, and a mass analyzer to define a first ion beam having desired ions at a first charge state.
Wilhelm Platow, Shu Satoh, Neil Bassom
Filed: 29 Oct 21
Utility
Shielded Gas Inlet for an Ion Source
4 May 23
An ion source has arc chamber having one or more radiation generating features, an arc chamber body enclosing an internal volume, and at least one gas inlet aperture defined therein.
Neil K. Colvin, Neil Bassom, Joshua Abeshaus
Filed: 28 Oct 22
Utility
Extended Lifetime Dual Indirectly-heated Cathode Ion Source
30 Mar 23
An ion source has an arc chamber with a first end and a second end.
Wilhelm Platow, Neil Bassom, Jonathan David
Filed: 30 Sep 21
Utility
Blended energy ion implantation
9 Feb 23
Ion implantation systems and methods implant varying energies of an ion beam across a workpiece in a serial single-workpiece end station, where electrodes of an acceleration/deceleration stage, bend electrode and/or energy filter control a final energy or path of the ion beam to the workpiece.
James S. DeLuca, Dwight Roh, Patrick Heres, Atul Gupta
Filed: 4 Aug 22
Utility
Method and Apparatus for Continuous Chained Energy Ion Implantation
9 Feb 23
An ion implantation system and method that selectively varies an ion beam energy to a workpiece in sequential passes thereof in front of the beam.
Causon Jen, James S. DeLuca, William Bintz
Filed: 5 Aug 22
Utility
Ion source with multiple bias electrodes
3 Jan 23
An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume.
Wilhelm Platow, Paul Silverstein, Neil Bassom, Marvin Farley, David Sporleder
Filed: 12 May 21
Utility
Ion source repeller
6 Dec 22
An ion source has an arc chamber having one or more arc chamber walls defining and interior region of the arc chamber.
Steven T. Drummond, Neil Colvin, Paul Silverstein
Filed: 6 Apr 21