39 patents
Utility
Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride As a Source Material to Generate an Aluminum Ion Beam
2 Nov 23
An ion implantation system, ion source, and method are provided having a gaseous aluminum-based ion source material.
Neil K. Colvin, Neil Bassom, Edward Moore
Filed: 30 Jun 23
Utility
Hydraulic Feed System for an Ion Source
26 Oct 23
An ion source has an arc chamber defining an arc chamber volume.
Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
Filed: 16 Jun 23
Utility
Dual Source Injector with Switchable Analyzing Magnet
28 Sep 23
An ion implantation system has a mass analyzing magnet having interior and exterior region and defining a first entrance, second entrance, and an exit.
Wilhelm Platow, Neil Bassom
Filed: 28 Mar 22
Utility
Hydraulic Feed System for an Ion Source
3 Aug 23
An ion source has an arc chamber defining an arc chamber volume.
Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
Filed: 31 Jan 22
Utility
High Incidence Angle Graphite for Particle Control with Dedicated Low Sputter Yield Ion Beam
27 Jul 23
An ion source for an ion implantation system is configured to form an ion beam from a predetermined species along a beamline, where the ion beam is at an initial energy.
David M. Burtner, Neil J. Bassom
Filed: 20 Dec 22
Utility
Charge Filter Magnet with Variable Achromaticity
4 May 23
An ion implantation system has an ion source to generate an ion beam, and a mass analyzer to define a first ion beam having desired ions at a first charge state.
Wilhelm Platow, Shu Satoh, Neil Bassom
Filed: 29 Oct 21
Utility
Shielded Gas Inlet for an Ion Source
4 May 23
An ion source has arc chamber having one or more radiation generating features, an arc chamber body enclosing an internal volume, and at least one gas inlet aperture defined therein.
Neil K. Colvin, Neil Bassom, Joshua Abeshaus
Filed: 28 Oct 22
Utility
Extended Lifetime Dual Indirectly-heated Cathode Ion Source
30 Mar 23
An ion source has an arc chamber with a first end and a second end.
Wilhelm Platow, Neil Bassom, Jonathan David
Filed: 30 Sep 21
Utility
Blended energy ion implantation
9 Feb 23
Ion implantation systems and methods implant varying energies of an ion beam across a workpiece in a serial single-workpiece end station, where electrodes of an acceleration/deceleration stage, bend electrode and/or energy filter control a final energy or path of the ion beam to the workpiece.
James S. DeLuca, Dwight Roh, Patrick Heres, Atul Gupta
Filed: 4 Aug 22
Utility
Method and Apparatus for Continuous Chained Energy Ion Implantation
9 Feb 23
An ion implantation system and method that selectively varies an ion beam energy to a workpiece in sequential passes thereof in front of the beam.
Causon Jen, James S. DeLuca, William Bintz
Filed: 5 Aug 22
Utility
Ion Source with Multiple Bias Electrodes
17 Nov 22
An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume.
Wilhelm Platow, Paul Silverstein, Neil Bassom, Marvin Farley, David Sporleder
Filed: 12 May 21
Utility
Ion Source Repeller
6 Oct 22
An ion source has an arc chamber having one or more arc chamber walls defining and interior region of the arc chamber.
Steven T. Drummond, Neil Colvin, Paul Silverstein
Filed: 6 Apr 21
Utility
Hybrid High-temperature Electrostatic Clamp for Improved Workpiece Temperature Uniformity
12 May 22
A thermal electrostatic clamp has a central electrostatic portion associated with a central region of a workpiece.
Atul Gupta, Scott E Galica
Filed: 10 Nov 21
Utility
Etching Aluminum Nitride or Aluminum Oxide to Generate an Aluminum Ion Beam
5 May 22
An ion implantation system, ion source, and method are provided, where an ion source is configured to ionize an aluminum-based ion source material and to form an ion beam and a by-product including a non-conducting material.
Neil K. Colvin, Neil Bassom, Xiao Xu
Filed: 4 Jun 21
Utility
Hydrogen Co-gas When Using a Chlorine-based Ion Source Material
13 Jan 22
An ion implantation system has an aluminum trichloride source material.
Neil K. Colvin, Neil Bassom, Xiangyang Wu
Filed: 4 Jun 21
Utility
Stepped Indirectly Heated Cathode with Improved Shielding
23 Dec 21
An ion source for forming a plasma has a cathode with a cavity and a cathode surface defining a cathode step.
Wilhelm Platow, Neil Bassom, Shu Satoh, Paul Silverstein, Marvin Farley
Filed: 26 May 21
Utility
Tuning Apparatus for Minimum Divergence Ion Beam
23 Dec 21
An ion implantation system has an ion source configured to form an ion beam.
Shu Satoh, Wilhelm Platow
Filed: 15 Jun 21
Utility
Active Workpiece Heating or Cooling for an Ion Implantation System
25 Nov 21
A heated chuck for an ion implantation system selectively clamps a workpiece to a carrier plate having heaters to selectively heat a clamping surface.
Joseph Ferrara, Brian Terry, John Baggett
Filed: 4 Aug 21
Utility
Apparatus and Method for Metal Contamination Control In an Ion Implantation System Using Charge Stripping Mechanism
12 Aug 21
A method for implanting high charge state ions into a workpiece while mitigating trace metal contamination includes generating desired ions at a first charge state from a desired species in an ion source, as well as generating trace metal ions of a contaminant species in a first ion beam.
Causon Ko-Chuan Jen, Shu Satoh, Genise Bonacorsi, William Bintz
Filed: 5 Feb 21
Utility
Hydrogen Generator for an Ion Implanter
25 Mar 21
A terminal for an ion implantation system is provided, wherein the terminal has a terminal housing for supporting an ion source configured to form an ion beam.
Neil K. Colvin, Tseh-Jen Hsieh, Richard Rzeszut, Wendy Colby
Filed: 20 Nov 20