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SITM SiTime

GRANT
Utility
Temperature stable mems resonator
3 Aug 21
A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member.
Paul M. Hagelin, Charles I. Grosjean
Filed: 4 Dec 19
APP
Utility
Encapsulated Microelectromechanical Structure
22 Jul 21
A semiconductor layer having an opening and a MEMS resonator formed in the opening is disposed between first and second substrates to encapsulate the MEMS resonator.
Aaron Partridge, Markus Lutz, Pavan Gupta
Filed: 3 Aug 20
APP
Utility
Stacked-die Mems Resonator
17 Jun 21
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 6 Jan 21
GRANT
Utility
Resonator electrode shields
18 May 21
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 11 Sep 19
GRANT
Utility
Low allan-deviation oscillator
11 May 21
An oscillator includes a resonator, sustaining circuit and detector circuit.
Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
Filed: 3 Mar 20
GRANT
Utility
Clock generator with dual-path temperature compensation
13 Apr 21
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 5 Feb 20
GRANT
Utility
Manufacturing of integrated circuit resonator
9 Feb 21
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 16 Jun 20
GRANT
Utility
Bonding process with inhibited oxide formation
2 Feb 21
First and second contacts are formed on first and second wafers from disparate first and second conductive materials, at least one of which is subject to surface oxidation when exposed to air.
Paul M. Hagelin, Charles I. Grosjean
Filed: 4 Dec 19
GRANT
Utility
Piezo-actuated MEMS resonator with surface electrodes
12 Jan 21
A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer.
Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller, Charles I. Grosjean
Filed: 6 Apr 18
APP
Utility
Mems Cavity with Non-contaminating Seal
16 Dec 20
A semiconductor device includes a first silicon layer disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers.
Michael Julian Daneman, Charles I. Grosjean, Paul M. Hagelin
Filed: 20 May 20
APP
Utility
Low-profile Stacked-die Mems Resonator System
9 Dec 20
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 15 Jun 20
GRANT
Utility
Temperature-compensated timing signal generator
30 Nov 20
The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.
Michael H. Perrott, Shungneng Lee
Filed: 28 Nov 18
GRANT
Utility
Temperature-reporting oscillator
9 Nov 20
In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer.
Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany, Charles I. Grosjean
Filed: 1 May 19
GRANT
Utility
MEMS with small-molecule barricade
12 Oct 20
A MEMS element within a semiconductor device is enclosed within a cavity bounded at least in part by hydrogen-permeable material.
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge
Filed: 1 Feb 18
GRANT
Utility
Encapsulated microelectromechanical structure
7 Sep 20
A semiconductor layer having an opening and a MEMS resonator formed in the opening is disposed between first and second substrates to encapsulate the MEMS resonator.
Aaron Partridge, Markus Lutz, Pavan Gupta
Filed: 9 Sep 19
GRANT
Utility
MEMS with over-voltage protection
10 Aug 20
A semiconductor device includes first and second exposed electrical contacts and a cavity having a microelectromechanical system (MEMS) structure therein.
Nicholas Miller, Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge
Filed: 1 Mar 18
GRANT
Utility
Package structure for micromechanical resonator
27 Jul 20
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 1 Apr 19
GRANT
Utility
Integrated circuit with oscillator signal based on switched-resistance circuitry
20 Jul 20
Phase-locked loop circuitry to generate an output signal, the phase-locked loop circuitry comprising oscillator circuitry, switched resistor loop filter, coupled to the input of the oscillator circuitry (which, in one embodiment, includes a voltage-controlled oscillator), including a switched resistor network including at least one resistor and at least one capacitor, wherein an effective resistance of the switched resistor network is responsive to and increases as a function of one or more pulsing properties of a control signal (wherein pulse width and frequency (or period) are pulsing properties of the control signal), phase detector circuitry, having an output which is coupled to the switched resistor loop filter, to generate the control signal (which may be periodic or non-periodic).
Michael H. Perrott
Filed: 7 Jul 19
GRANT
Utility
MEMS cavity with non-contaminating seal
29 Jun 20
A semiconductor device includes a first silicon layer disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers.
Michael Julian Daneman, Charles I. Grosjean, Paul M. Hagelin
Filed: 13 Feb 18
APP
Utility
Ovenized Mems
10 Jun 20
One or more heating elements are provided to heat a MEMS component (such as a resonator) to a temperature higher than an ambient temperature range in which the MEMS component is intended to operate—in effect, heating the MEMS component and optionally related circuitry to a steady-state “oven” temperature above that which would occur naturally during component operation and thereby avoiding temperature-dependent performance variance/instability (frequency, voltage, propagation delay, etc.).
Carl Arft, Aaron Partridge, Markus Lutz, Charles I. Grosjean
Filed: 28 Nov 19
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