75 patents
Page 2 of 4
Utility
Temperature-reporting oscillator
9 May 23
In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer.
Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany, Charles I. Grosjean
Filed: 23 Dec 21
Utility
MEMS cavity with non-contaminating seal
4 Apr 23
A semiconductor device includes a first silicon layer disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers.
Michael Julian Daneman, Charles I. Grosjean, Paul M. Hagelin
Filed: 6 Dec 21
Utility
Frequency-modulating sensor array
21 Mar 23
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Paul M. Hagelin, Charles I. Grosjean, Lev Goncharov
Filed: 2 Apr 22
Utility
MEMS resonator
21 Feb 23
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll
Filed: 29 Apr 20
Utility
Micromachined thermistor
3 Jan 23
A micromachined apparatus includes micromachined thermistor having first and second ends physically and thermally coupled to a substrate via first and second anchor structures to enable a temperature-dependent resistance of the micromachined thermistor to vary according to a time-varying temperature of the substrate.
Carl Arft, Aaron Partridge, Paul M. Hagelin
Filed: 10 Sep 19
Utility
Resonator electrode shields
3 Jan 23
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 14 May 21
Utility
Clock generator with dual-path temperature compensation
13 Dec 22
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 7 Dec 21
Utility
Ovenized Mems
10 Nov 22
One or more heating elements are provided to heat a MEMS component (such as a resonator) to a temperature higher than an ambient temperature range in which the MEMS component is intended to operate—in effect, heating the MEMS component and optionally related circuitry to a steady-state “oven” temperature above that which would occur naturally during component operation and thereby avoiding temperature-dependent performance variance/instability (frequency, voltage, propagation delay, etc.).
Carl Arft, Aaron Partridge, Markus Lutz, Charles I. Grosjean
Filed: 25 May 22
Utility
Stacked-die Mems Resonator
10 Nov 22
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 27 May 22
Utility
Bonding process with inhibited oxide formation
1 Nov 22
First and second contacts are formed on first and second wafers from disparate first and second conductive materials, at least one of which is subject to surface oxidation when exposed to air.
Paul M. Hagelin, Charles I. Grosjean
Filed: 30 Dec 20
Utility
Temperature stable MEMS resonator
11 Oct 22
A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member.
Paul M. Hagelin, Charles I. Grosjean
Filed: 30 Jun 21
Utility
Frequency-modulating Sensor Array
15 Sep 22
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Paul M. Hagelin, Charles I. Grosjean, Lev Goncharov
Filed: 2 Apr 22
Utility
Resonator electrode shields
13 Sep 22
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 11 Mar 21
Utility
Mems Cavity with Non-contaminating Seal
26 May 22
A semiconductor device includes a first silicon layer disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers.
Michael Julian Daneman, Charles I. Grosjean, Paul M. Hagelin
Filed: 6 Dec 21
Utility
Low Allan-Deviation oscillator
3 May 22
An oscillator includes a resonator, sustaining circuit and detector circuit.
Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
Filed: 12 Mar 21
Utility
Frequency-modulating sensor array
3 May 22
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition.
Paul M. Hagelin, Charles I. Grosjean, Lev Goncharov
Filed: 12 Sep 17
Utility
MEMS with over-voltage protection
26 Apr 22
A semiconductor device includes first and second exposed electrical contacts and a cavity having a microelectromechanical system (MEMS) structure therein.
Nicholas Miller, Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge
Filed: 29 Jun 20
Utility
Temperature-reporting oscillator
8 Feb 22
In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer.
Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany, Charles I. Grosjean
Filed: 1 Oct 20
Utility
Microelectromechanical resonator
18 Jan 22
A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers.
Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill
Filed: 10 Jan 19
Utility
Clock generator with dual-path temperature compensation
18 Jan 22
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 11 Mar 21