60 patents
Utility
Bonding process with inhibited oxide formation
9 Jan 24
First and second contacts are formed on first and second wafers from disparate first and second conductive materials, at least one of which is subject to surface oxidation when exposed to air.
Paul M. Hagelin, Charles I. Grosjean
Filed: 27 Sep 22
Utility
Time module apparatus for use with fixed-beacon time transfer system
9 Jan 24
In various time-transfer systems, one or more fixed-position time beacons broadcast radio-frequency (RF) time-transfer messages to time-keeping modules disposed in remote radio heads and other strategic locations to achieve highly reliable and accurate synchronized time, phase, and frequency transfer over a metropolitan or other wide-field area.
Markus Lutz, Sassan Tabatabaei, Charles I. Grosjean, Paul M. Hagelin, Aaron Partridge
Filed: 22 Nov 21
Utility
Multi-die integrated circuit package
7 Nov 23
The present inventions, in one aspect, are directed to micromachined resonator comprising: a first resonant structure extending along a first axis, wherein the first axis is different from a crystal axis of silicon, a second resonant structure extending along a second axis, wherein the second axis is different from the first axis and the crystal axis of silicon and wherein the first resonant structure is coupled to the second resonant structure, and wherein the first and second resonant structures are comprised of silicon (for example, substantially monocrystalline) and include an impurity dopant (for example, phosphorus) having a concentrations which is greater than 1019 cm-3, and preferably between 1019 cm-3 and 1021 cm-3.
Renata M. Berger, Ginel C. Hill, Paul M. Hagelin, Charles I. Grosjean, Aaron Partridge, Joseph C. Doll, Markus Lutz
Filed: 19 Jun 17
Utility
Resonator electrode shields
24 Oct 23
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 30 Nov 22
Utility
Clock generator with dual-path temperature compensation
17 Oct 23
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 26 Oct 22
Utility
MEMS resonator with co-located temperature sensor
26 Sep 23
A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface.
Charles I. Grosjean, Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz
Filed: 10 Mar 21
Utility
Temperature stable MEMS resonator
19 Sep 23
A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member.
Paul M. Hagelin, Charles I. Grosjean
Filed: 1 Sep 22
Utility
Frequency-modulating sensor array
5 Sep 23
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Paul M. Hagelin, Charles I. Grosjean, Lev Goncharov
Filed: 13 Dec 22
Utility
Capacitor-referenced temperature sensing
5 Sep 23
The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.
Michael H. Perrott, Shungneng Lee
Filed: 6 Dec 21
Utility
MEMS with small-molecule barricade
22 Aug 23
A MEMS element within a semiconductor device is enclosed within a cavity bounded at least in part by hydrogen-permeable material.
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge
Filed: 24 Dec 21
Utility
MEMS resonator
15 Aug 23
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll
Filed: 30 Nov 22
Utility
MEMS with small-molecule barricade
8 Aug 23
A MEMS element within a semiconductor device is enclosed within a cavity bounded at least in part by hydrogen-permeable material.
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge
Filed: 9 Sep 20
Utility
Low allan-deviation oscillator
1 Aug 23
An oscillator includes a resonator, sustaining circuit and detector circuit.
Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
Filed: 2 Apr 22
Utility
Stacked-die MEMS resonator
25 Jul 23
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 27 May 22
Utility
Microelectromechanical structure with bonded cover
27 Jun 23
A semiconductor layer having an opening and a MEMS resonator formed in the opening is disposed between first and second substrates to encapsulate the MEMS resonator.
Aaron Partridge, Markus Lutz, Pavan Gupta
Filed: 3 Aug 20
Utility
Temperature-reporting oscillator
9 May 23
In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer.
Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany, Charles I. Grosjean
Filed: 23 Dec 21
Utility
MEMS cavity with non-contaminating seal
4 Apr 23
A semiconductor device includes a first silicon layer disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers.
Michael Julian Daneman, Charles I. Grosjean, Paul M. Hagelin
Filed: 6 Dec 21
Utility
Frequency-modulating sensor array
21 Mar 23
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Paul M. Hagelin, Charles I. Grosjean, Lev Goncharov
Filed: 2 Apr 22
Utility
MEMS resonator
21 Feb 23
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll
Filed: 29 Apr 20
Utility
Micromachined thermistor
3 Jan 23
A micromachined apparatus includes micromachined thermistor having first and second ends physically and thermally coupled to a substrate via first and second anchor structures to enable a temperature-dependent resistance of the micromachined thermistor to vary according to a time-varying temperature of the substrate.
Carl Arft, Aaron Partridge, Paul M. Hagelin
Filed: 10 Sep 19