22 patents
Utility
Fluid Control System
5 Oct 23
An improved fluid delivery system and method that directly controls the concentration of constituent components in a fluid mixture delivered, for example, to a process chamber.
Philip Ryan Barros, Greg Patrick Mulligan, Chris Melcer
Filed: 9 May 23
Utility
Seal Retainer for a Component Assembly and Method of Installing a Component into an Apparatus for Controlling Flow
21 Sep 23
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Stephen CARSON, Randolph Treur
Filed: 23 May 23
Utility
Fluid Delivery Module
3 Aug 23
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Michael Vogtmann
Filed: 29 Dec 22
Utility
Fluid Delivery System
25 May 23
Fluid delivery systems are important component assemblies used for semiconductor fabrication.
Randolph TREUR, Stephen CARSON, Michael VOGTMANN
Filed: 21 Nov 22
Utility
Modular Fitting Assembly and System Incorporating Same
2 Feb 23
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Lukas Sykora, Stephen Carson, Zachary Smith
Filed: 25 Jul 22
Utility
Fluid Delivery Module
26 Jan 23
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Philip Ryan Barros, Greg Patrick Mulligan, Dustin Tomhave, Christopher Bryant Davis
Filed: 15 Jul 22
Utility
Method of Manufacturing Semiconductors Using Fluid Delivery System
1 Dec 22
A substrate block for a fluid delivery system is provided, the substrate block having an upper surface.
Chris MELCER, Phillip Ryan BARROS, Haruyuki KUBOTA, Randolph TREUR, Todd Mark CUSHMAN
Filed: 12 Aug 22
Utility
Guided Flow Valve Assembly and System Incorporating Same
22 Sep 22
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Stephen Carson
Filed: 17 Mar 22
Utility
Fluid Flow Control System Comprising a Manifold Assembly
8 Sep 22
Systems for processing articles are essential for semiconductor fabrication.
Philip Ryan Barros, Greg Patrick Mulligan
Filed: 14 Feb 22
Utility
Laminar Flow Restrictor and Seal for Same
14 Jul 22
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Joseph Penley, Zachariah Ezekiel McIntyre, Tyler James Wright, Matthew Eric Kovacic, Christopher Bryant Davis
Filed: 31 Mar 22
Utility
Method of Manufacturing Semiconductors Using Fluid Delivery System
27 Jan 22
A method of processing semiconductors using a fluid delivery system is disclosed in which seal inserts are utilized to fluidly connect an active component that bridges two substrate blocks.
Chris MELCER, Phillip Ryan BARROS, Haruyuki KUBOTA, Randolph TREUR, Todd Mark CUSHMAN
Filed: 6 Oct 21
Utility
Flow Control System, Method, and Apparatus
6 Jan 22
A gas flow control system for delivering a plurality of gas flows.
Daniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II, Sean Joseph Penley, Michael Maeder, Patti J. Mudd, Zachariah Ezekiel McIntyre, Tyler James Wright, Matthew Eric Kovacic, Christopher Bryant Davis
Filed: 7 Sep 21
Utility
Seal Insertion Tool for a Fluid Delivery Module and Method of Installing a Seal into a Fluid Delivery Module
25 Nov 21
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Stephen CARSON
Filed: 13 May 21
Utility
Fluid Control System
25 Nov 21
An improved fluid delivery system and method that directly controls the concentration of constituent components in a fluid mixture delivered, for example, to a process chamber.
Philip Ryan Barros, Greg Patrick Mulligan, Chris Melcer
Filed: 4 Aug 21
Utility
Seal Retainer for a Component Assembly and Method of Installing a Component into an Apparatus for Controlling Flow
18 Nov 21
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Stephen CARSON, Randolph TREUR
Filed: 12 May 21
Utility
Fluid Delivery System
24 Jun 21
A fluid delivery system may include a substrate block having an upper surface; a first substrate port in the upper surface; a second substrate port in the upper surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining the second substrate port; and a substrate seal channel formed in the upper surface and surrounding the substrate ring.
Chris MELCER, Philip Ryan BARROS, Haruyuki KUBOTA, Randolph TREUR, Todd CUSHMAN
Filed: 10 Mar 21
Utility
Liquid Delivery System
27 May 21
A fluid delivery system may include a substrate block having an upper surface; a first substrate port in the upper surface; a second substrate port in the upper surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining the second substrate port; and a substrate seal channel formed in the upper surface and surrounding the substrate ring.
Chris MELCER, Phillip Ryan BARROS, Haruyuki KUBOTA, Randolph TREUR, Todd CUSHMAN
Filed: 4 Oct 18
Utility
Seal for a Flow Restrictor
11 Feb 21
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Matthew Eric Kovacic, Zachariah Ezekiel McIntyre, Sean Joseph Penley, Christopher Bryant Davis
Filed: 5 Aug 20
Utility
Laminar Flow Restrictor
11 Feb 21
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Joseph Penley, Zachariah Ezekiel McIntyre, Tyler James Wright
Filed: 5 Aug 20
Utility
Flow Control System, Method, and Apparatus
6 Jan 21
A mass flow control apparatus having a monolithic base.
Daniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder, Patti J. Mudd, Zachariah Ezekiel McIntyre, Tyler James Wright, Matthew Eric Kovacic, Christopher Bryant Davis
Filed: 20 Sep 20