360 patents
Page 11 of 18
Utility
Optical metrology tool equipped with modulated illumination sources
6 Apr 21
The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length.
Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady, Derrick A. Shaughnessy
Filed: 25 Feb 19
Utility
Process and metrology control, process indicators and root cause analysis tools based on landscape information
30 Mar 21
Methods and metrology modules are provided, which derive landscape information (expressing relation(s) between metrology metric(s) and measurement parameters) from produced wafers, identifying therein indications for production process changes, and modify production process parameters with respect to the identified indications, to maintain the production process within specified requirements.
Roie Volkovich, Yaniv Abramovitz
Filed: 20 Jun 18
Utility
Systems and methods for electrical inspection of flat panel displays using cell contact probing pads
30 Mar 21
A probe system for facilitating inspection of a device under test comprising a plurality of panels, the probe system incorporating: a configurable universal probe bar comprising a plurality of probe blocks, the plurality of probe blocks comprising a plurality of probe pins positioned to simultaneously electrically engage a plurality of cell contact pads of the plurality of panels of the device under test to deliver a plurality of electrical test signals; and an alignment system configured to achieve an alignment of the plurality of probe pins with the plurality of the cell contact pads of the plurality of panels of the device under test.
Gordon Yue, Lloyd Russell Jones, Neil Dang Nguyen, Kiran Jitendra, Kent Nguyen, Steven Aochi
Filed: 22 Nov 16
Utility
System, method for training and applying defect classifiers in wafers having deeply stacked layers
30 Mar 21
A system, method, and non-transitory computer readable medium are provided for training and applying defect classifiers in wafers having deeply stacked layers.
Martin Plihal, Ankit Jain
Filed: 5 Jan 18
Utility
Combining simulation and optical microscopy to determine inspection mode
30 Mar 21
A best optical inspection mode to detect defects can be determined when no defect examples or only a limited number of defect examples are available.
Bjorn Brauer
Filed: 7 Mar 19
Utility
High resolution electron energy analyzer
30 Mar 21
A high-resolution electron energy analyzer is disclosed.
Xinrong Jiang, Christopher Sears, Nikolai Chubun
Filed: 11 Mar 19
Utility
3D Microscope Including Insertable Components to Provide Multiple Imaging and Measurement Capabilities
25 Mar 21
A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities.
James Jianguo Xu, Ken Kinsun Lee, Rusmin Kudinar, Ronny Soetarman, Hung Phi Nguyen, Zhen Hou
Filed: 2 Dec 20
Utility
Repeater defect detection
23 Mar 21
Repeater defects on a wafer can be detected by fusing multiple die images.
Premchandra M. Shankar, Ashok Varadarajan, JuHwan Rha
Filed: 14 Sep 17
Utility
Defect classification by fitting optical signals to a point-spread function
23 Mar 21
A semiconductor die is inspected using an optical microscope to generate a test image of the semiconductor die.
Soren Konecky, Bjorn Brauer
Filed: 15 Mar 19
Utility
Phase filter for enhanced defect detection in multilayer structure
23 Mar 21
Disclosed are methods and apparatus for facilitating defect detection in a multilayer stack.
Robert M. Danen, Dmitri G Starodub
Filed: 26 Feb 20
Utility
Guided scanning electron microscopy metrology based on wafer topography
23 Mar 21
A wafer topography measurement system can be paired with a scanning electron microscope.
Arpit Yati, Shivam Agarwal, Jagdish Saraswatula, Andrew Cross
Filed: 16 Nov 17
Utility
X-ray metrology system with broadband laser produced plasma illuminator
23 Mar 21
Methods and systems for x-ray based semiconductor metrology utilizing a broadband, soft X-ray illumination source are described herein.
Oleg Khodykin, Alexander Bykanov
Filed: 10 Jan 18
Utility
System and method for cleaning optical surfaces of an extreme ultraviolet optical system
23 Mar 21
The present invention provides a local clean microenvironment near optical surfaces of an extreme ultraviolet (EUV) optical assembly maintained in a vacuum process chamber and configured for EUV lithography, metrology, or inspection.
Gildardo Delgado, Francis Chilese, Rudy F. Garcia, Mohammed Tahmassebpur, Salam Harb
Filed: 5 Apr 13
Utility
3D Microscope Including Insertable Components to Provide Multiple Imaging and Measurement Capabilities
18 Mar 21
A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities.
James Jianguo Xu, Ken Kinsun Lee, Rusmin Kudinar, Ronny Soetarman, Hung Phi Nguyen, Zhen Hou
Filed: 2 Dec 20
Utility
Wafer Processing System
18 Mar 21
A wafer processing system has a transport vacuum chamber for handling a frame assembly under vacuum conditions, at least one vacuum cassette elevator load lock for housing a cassette and adjusting a vertical position of the cassette under vacuum conditions, and at least one wafer processing module in vacuum communication with the transport vacuum chamber.
Attila Nagy, Kris Martin
Filed: 2 Jul 20
Utility
Optical profilometer with color outputs
16 Mar 21
A system includes a light source configured to selectively output light.
Scott A. Chalmers
Filed: 4 Jul 18
Utility
Super-resolution defect review image generation through generative adversarial networks
16 Mar 21
A system for analyzing a sample includes an inspection sub-system and at least one controller.
Anuj Pandey, Bradley Ries, Himanshu Vajaria, Yong Zhang, Rahul Lakhawat
Filed: 5 Nov 18
Utility
Measurement of overlay error using device inspection system
9 Mar 21
A method and system for measuring overlay in a semiconductor manufacturing process comprise capturing an image of a feature in an article at a predetermined manufacturing stage, deriving a quantity of an image parameter from the image and converting the quantity into an overlay measurement.
Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Liran Yerushalmi, Antonio Mani, Allen Park, Stilian Pandev, Andrei Shchegrov, Jon Madsen
Filed: 24 Jun 18
Utility
Apparatus, method and computer program product for defect detection in work pieces
2 Mar 21
An apparatus, a method and a computer program product for defect detection in work pieces is disclosed.
Tom Marivoet, Carl Truyens, Christophe Wouters
Filed: 17 Jun 19
Utility
Differential methods and apparatus for metrology of semiconductor targets
2 Mar 21
Disclosed are apparatus and methods for determining process or structure parameters for semiconductor structures.
Stilian Ivanov Pandev, Andrei V. Shchegrov
Filed: 6 Aug 14