262 patents
Page 6 of 14
Utility
Position correction method and a system for position correction in relation to four probe resistance measurements
28 Sep 21
The present invention relates to a method of establishing specific electrode positions by providing a multi-point probe and a test sample.
Frederik Westergaard Osterberg, Alberto Cagliani, Dirch Hjorth Petersen, Ole Hansen
Filed: 8 Jan 18
Utility
Plasma etching apparatus
21 Sep 21
A method is for cleaning a plasma etching apparatus of the type used to etch a substrate and having at least one chamber.
Stephen R. Burgess, Anthony Paul Wilby
Filed: 21 May 19
Utility
Method and system for charged particle microscopy with improved image beam stabilization and interrogation
14 Sep 21
A scanning electron microscopy system with improved image beam stability is disclosed.
Doug K. Masnaghetti, Gabor Toth, David Trease, Rohit Bothra, Grace Hsiu-Ling Chen, Rainer Knippelmeyer
Filed: 27 Mar 20
Utility
Defect location accuracy using shape based grouping guided defect centering
14 Sep 21
Defect location accuracy can be increased using shape based grouping with pattern-based defect centering.
Jagdish Chandra Saraswatula, Martin Plihal
Filed: 25 Feb 18
Utility
Slotted electrostatic chuck
14 Sep 21
An assembly for clamping semiconductor wafers includes a plate and an electrostatic chuck mounted on the plate.
Aviv Balan, Haoran Jiang
Filed: 5 Oct 18
Utility
Hermetic sealing of a nonlinear crystal for use in a laser system
14 Sep 21
Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system.
Rajeev Patil, David Ramirez, Yevgeniy Churin, William Replogle
Filed: 17 Sep 18
Utility
Efficient illumination shaping for scatterometry overlay
14 Sep 21
A multipole illumination system may include an illumination source to generate a source beam, one or more acousto-optic deflectors to diffract the source beam along at least two directions; one or more collection lenses to collect at least some of the diffracted light from the one or more acousto-optic deflectors, and a controller to generate one or more drive signals for the one or more acousto-optic deflectors.
Andrew V. Hill, Dmitry Gorelik
Filed: 13 Feb 19
Utility
Moiré target and method for using the same in measuring misregistration of semiconductor devices
14 Sep 21
A target for use in the optical measurement of misregistration in the manufacture of semiconductor devices, the target including a first periodic structure formed on a first layer of a semiconductor device and having a first pitch along an axis and a second periodic structure formed on a second layer of the semiconductor device and having a second pitch along the axis, different from the first pitch, the second periodic structure extending beyond the first periodic structure along the axis.
Mark Ghinovker
Filed: 10 Apr 19
Utility
Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s)
14 Sep 21
Scatterometry overlay (SCOL) measurement methods, systems and targets are provided to enable efficient SCOL metrology with in-die targets.
Amnon Manassen, Yuri Paskover, Eran Amit
Filed: 5 Aug 19
Utility
Hybrid overlay target design for imaging-based overlay and scatterometry-based overlay
7 Sep 21
Designs for a hybrid overlay target design that includes a target area with both an imaging-based target and a scatterometry-based target are disclosed.
David Gready
Filed: 1 Jun 18
Utility
Inspection system with non-circular pupil
7 Sep 21
An inspection system includes an illumination source configured to generate extreme ultraviolet (EUV) light, illumination optics to direct the EUV light to a sample within a range of off-axis incidence angles corresponding to an illumination pupil distribution, collection optics to collect light from the sample in response to the incident EUV light within a range of collection angles corresponding to an imaging pupil distribution, and a detector configured to receive at least a portion of the light collected by the collection optics.
Damon F. Kvamme, Rui-fang Shi, Daniel C. Wack, Sseunhyeun Jo, Xin Ye
Filed: 25 Jan 19
Utility
Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements
7 Sep 21
Scatterometry overlay targets as well as target design and measurement methods are provided, which mitigate the effects of grating asymmetries in diffraction based overlay measurements.
Ido Adam, Vladimir Levinski, Amnon Manassen, Yuval Lubashevsky
Filed: 15 Dec 17
Utility
Back-illuminated sensor and a method of manufacturing a sensor
7 Sep 21
An image sensor for electrons or short-wavelength light includes a semiconductor membrane, circuit elements formed on one surface of the semiconductor membrane, and a pure boron layer on the other surface of the semiconductor membrane.
Yung-Ho Alex Chuang, Jingjing Zhang, John Fielden, David L. Brown, Masaharu Muramatsu, Yasuhito Yoneta, Shinya Otsuka
Filed: 23 May 19
Utility
Optical instrumentation including a spatially variable filter
24 Aug 21
A system comprising a light source, and a retention device configured to receive and retain a sample for measurement.
Scott A. Chalmers, Randall S. Geels, Matthew F. Ross
Filed: 3 Mar 17
Utility
Deep learning based adaptive regions of interest for critical dimension measurements of semiconductor substrates
17 Aug 21
A metrology system is disclosed.
Arpit Yati
Filed: 23 May 19
Utility
Wafer exposure method using wafer models and wafer fabrication assembly
17 Aug 21
Critical dimension values can be obtained from wafer structures at predefined measurement sites.
Stefan Buhl, Philip Groeger, Patrick Lomtscher
Filed: 19 Feb 20
Utility
Charge control device for a system with multiple electron beams
10 Aug 21
Systems and methods to focus and align multiple electron beams are disclosed.
Christopher Sears, Luca Grella
Filed: 27 Aug 18
Utility
Optimizing computational efficiency by multiple truncation of spatial harmonics
10 Aug 21
Methods and systems for solving measurement models of complex device structures with reduced computational effort and memory requirements are presented.
Andrei Veldman
Filed: 26 Dec 18
Utility
Enhancing metrology target information content
10 Aug 21
Metrology targets designs, design methods and measurement methods are provided, which reduce noise and enhance measurement accuracy.
Eran Amit, Amnon Manassen, Nadav Gutman
Filed: 14 Sep 18
Utility
Hybrid overlay target design for imaging-based overlay and scatterometry-based overlay
3 Aug 21
Designs for a hybrid overlay target design that includes a target area with both an imaging-based target and a scatterometry-based target are disclosed.
David Gready
Filed: 1 Jun 18