262 patents
Page 8 of 14
Utility
Air scattering standard for light scattering based optical instruments and tools
25 May 21
An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.
Frank Li, Qing Li, Zhiwei Xu
Filed: 19 Feb 19
Utility
DC magnetron sputtering
18 May 21
A DC magnetron sputtering apparatus is for depositing a film on a substrate.
Scott Haymore, Amit Rastogi, Rhonda Hyndman, Steve Burgess, Ian Moncrieff, Chris Kendal
Filed: 4 Apr 17
Utility
Optical-mode selection for multi-mode semiconductor inspection
18 May 21
One or more semiconductor wafers or portions thereof are scanned using a primary optical mode, to identify defects.
Bjorn Brauer, Richard Wallingford, Kedar Grama, Hucheng Lee, Sangbong Park
Filed: 8 May 19
Utility
Systems and methods for automatic correction of drift between inspection and design for massive pattern searching
18 May 21
Systems and methods for automatic correction of drift between inspection and design for massive pattern searching are disclosed herein.
Chi-Yuan Tseng, Ming-Hsiang Hsueh
Filed: 12 May 17
Utility
Apparatus and method for two dimensional nanoindentation
4 May 21
A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction.
Warren C. Oliver, Kermit H. Parks, Kurt Johanns, P. Sudharshan Phani, John B. Pethica
Filed: 14 Jan 19
Utility
Adaptive care areas for die-die inspection
4 May 21
The present disclosure describes methods, systems, and articles of manufacture for performing a defect inspection of a die image using adaptive care areas (ACAs).
Himanshu Vajaria, Jan Lauber, Yong Zhang
Filed: 12 Oct 18
Utility
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
13 Apr 21
A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma.
Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
Filed: 13 Feb 18
Utility
Reflective pupil relay system
13 Apr 21
Methods and systems for relaying an optical image using a cascade arrangement of tilted, concave mirrors are presented.
Andrew Hill, Gregory Brady
Filed: 1 Oct 14
Utility
Nano-structured non-polarizing beamsplitter
13 Apr 21
A beamsplitter includes a substrate formed from a material transparent to wavelengths of light at least above a selected cutoff wavelength and reflective structures distributed across a surface of the substrate.
Dmitry Gorelik, Andrew V. Hill, Ohad Bachar, Amnon Manassen, Daria Negri
Filed: 21 Sep 18
Utility
Pre-cleaning a semiconductor structure
13 Apr 21
The invention relates to a method of pre-cleaning a semiconductor structure and to associated modular semiconductor process tools.
Alex Theodosiou, Steve Burgess
Filed: 11 Sep 14
Utility
Optical metrology tool equipped with modulated illumination sources
6 Apr 21
The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length.
Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady, Derrick A. Shaughnessy
Filed: 25 Feb 19
Utility
Defect discovery using electron beam inspection and deep learning with real-time intelligence to reduce nuisance
6 Apr 21
A deep learning algorithm is used for defect discovery, such as for semiconductor wafers.
Arpit Yati
Filed: 13 Jul 18
Utility
Systems and methods for electrical inspection of flat panel displays using cell contact probing pads
30 Mar 21
A probe system for facilitating inspection of a device under test comprising a plurality of panels, the probe system incorporating: a configurable universal probe bar comprising a plurality of probe blocks, the plurality of probe blocks comprising a plurality of probe pins positioned to simultaneously electrically engage a plurality of cell contact pads of the plurality of panels of the device under test to deliver a plurality of electrical test signals; and an alignment system configured to achieve an alignment of the plurality of probe pins with the plurality of the cell contact pads of the plurality of panels of the device under test.
Gordon Yue, Lloyd Russell Jones, Neil Dang Nguyen, Kiran Jitendra, Kent Nguyen, Steven Aochi
Filed: 22 Nov 16
Utility
Process and metrology control, process indicators and root cause analysis tools based on landscape information
30 Mar 21
Methods and metrology modules are provided, which derive landscape information (expressing relation(s) between metrology metric(s) and measurement parameters) from produced wafers, identifying therein indications for production process changes, and modify production process parameters with respect to the identified indications, to maintain the production process within specified requirements.
Roie Volkovich, Yaniv Abramovitz
Filed: 20 Jun 18
Utility
System, method for training and applying defect classifiers in wafers having deeply stacked layers
30 Mar 21
A system, method, and non-transitory computer readable medium are provided for training and applying defect classifiers in wafers having deeply stacked layers.
Martin Plihal, Ankit Jain
Filed: 5 Jan 18
Utility
Combining simulation and optical microscopy to determine inspection mode
30 Mar 21
A best optical inspection mode to detect defects can be determined when no defect examples or only a limited number of defect examples are available.
Bjorn Brauer
Filed: 7 Mar 19
Utility
High resolution electron energy analyzer
30 Mar 21
A high-resolution electron energy analyzer is disclosed.
Xinrong Jiang, Christopher Sears, Nikolai Chubun
Filed: 11 Mar 19
Utility
Repeater defect detection
23 Mar 21
Repeater defects on a wafer can be detected by fusing multiple die images.
Premchandra M. Shankar, Ashok Varadarajan, JuHwan Rha
Filed: 14 Sep 17
Utility
Defect classification by fitting optical signals to a point-spread function
23 Mar 21
A semiconductor die is inspected using an optical microscope to generate a test image of the semiconductor die.
Soren Konecky, Bjorn Brauer
Filed: 15 Mar 19
Utility
Phase filter for enhanced defect detection in multilayer structure
23 Mar 21
Disclosed are methods and apparatus for facilitating defect detection in a multilayer stack.
Robert M. Danen, Dmitri G Starodub
Filed: 26 Feb 20