7578 patents
Page 5 of 379
Utility
Apparatus and methods for alignment of a susceptor
2 Jan 24
The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber.
Edric Tong, James Francis Mack, Paul Brillhart
Filed: 24 Sep 20
Utility
Techniques to improve adhesion and defects for tungsten carbide film
2 Jan 24
Implementations of the present disclosure generally relate to hardmask films and methods for depositing hardmask films.
Vivek Bharat Shah, Anup Kumar Singh, Bhaskar Kumar, Ganesh Balasubramanian
Filed: 3 Jan 19
Utility
Catalyst enhanced molybdenum deposition and gap fill
2 Jan 24
Methods of depositing a metal film are discussed.
Xi Cen, Kai Wu, Seshadri Ganguli, Xinming Zhang, Norman L. Tam, Abhilash Mayur
Filed: 21 May 21
Utility
Molecular layer deposition of amorphous carbon films
2 Jan 24
Methods of forming carbon polymer films are disclosed.
Bhaskar Jyoti Bhuyan, Mark Saly, Ahbijit Basu Mallick, Eugene Yu Jin Kong, Bo Qi
Filed: 12 Mar 20
Utility
Depth profiling of semiconductor structures using picosecond ultrasonics
2 Jan 24
Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature.
Ori Golani, Ido Almog
Filed: 20 Oct 22
Utility
Multi-chamber substrate processing platform
2 Jan 24
Substrate processing systems or platforms and methods configured to process substrates including of extreme ultraviolet (EUV) mask blanks are disclosed.
Ribhu Gautam, Vibhu Jindal, Sanjay Bhat, Praveen Kumar Choragudi, Vinodh Ramachandran, Arun Rengaraj
Filed: 21 Dec 20
Utility
Extreme ultraviolet mask absorber materials
2 Jan 24
Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed.
Shuwei Liu, Shiyu Liu, Azeddine Zerrade, Vibhu Jindal
Filed: 23 Mar 21
Utility
Process recipe creation and matching using feature models
2 Jan 24
A method includes receiving a set of feature models, each feature model of the set of feature models corresponding to a respective feature associated with processing of a component, receiving a set of target properties for processing the component, where the set of target properties includes, for each feature, a respective target, determining, based on the set of feature models, one or more sets of predicted processing parameters in view of the set of target properties, generating one or more candidate process recipes each corresponding to a respective one of the one or more sets of predicted processing parameters, where the one or more candidate process recipes each correspond to a set of predicted properties including, for each feature, a respective predicted property value resulting from component processing, and selecting, from the one or more candidate process recipes, a process recipe for processing the component.
Dermot P. Cantwell, Taehun Kim
Filed: 13 Sep 21
Utility
System and method for detecting rare stochastic defects
2 Jan 24
A method for detecting a rare stochastic defect, the method may include searching for a rare stochastic defect in a dense pattern of a substrate, wherein the rare stochastic defect is (a) of nanometric scale, (b) appears in a functional pattern of the substrate with a defect density that is below 10−9, and (c) appears in the dense pattern with a defect density that is above 10−7; wherein the dense pattern is a dense representation of the functional pattern that differs from the functional pattern by at least one out of (a) a distance between features of the dense pattern, and (b) a width of the features of the dense pattern; and estimating the occurrence of the rare stochastic defect within the functional pattern based on an outcome of the searching.
Guy Cohen
Filed: 13 Aug 21
Utility
Method and system for foreline deposition diagnostics and control
2 Jan 24
Systems, apparatus, and methods are disclosed for foreline diagnostics and control.
Ala Moradian, Martin A. Hilkene, Zuoming Zhu, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi, Patricia M. Liu, Surendra Singh Srivastava
Filed: 27 Oct 20
Utility
System and method for dissipating workpiece charge build up
2 Jan 24
A system and method for reducing charge on a workpiece disposed on a platen is disclosed.
David Morrell, Dawei Sun, Qin Chen
Filed: 10 May 22
Utility
Systems and methods for predicting film thickness of individual layers using virtual metrology
2 Jan 24
A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit a film stack on a surface of a substrate, wherein the film stack comprises a plurality of layers of a first material and a plurality of layers of a second material.
Bharath Ram Sundar, Raman K. Nurani, Utkarsha Avinash Dhanwate, Ramakrishnan S. Hariharan, Suresh Bharatharajan Kudallur, Vishwath Ram Amarnath
Filed: 3 Feb 21
Utility
Gas mixer to enable RPS purging
2 Jan 24
A semiconductor processing system includes a remote plasma source (RPS), a faceplate, and an output manifold positioned between the RPS and the faceplate.
Fang Ruan, Diwakar Kedlaya, Amit Bansal, Venkata Sharat Chandra Parimi, Rajaram Narayanan, Badri N. Ramamurthi, Sherry L. Mings, Job George Konnoth Joseph, Rupankar Choudhury
Filed: 15 Oct 20
Utility
Correcting component failures in ion implant semiconductor manufacturing tool
2 Jan 24
A method includes determining, based on sensor data, that one or more components of substrate processing equipment are within a pre-failure window that is after a normal operation window.
Tianqing Liao, Sima Didari, Harikrishnan Rajagopal
Filed: 27 May 22
Utility
Directional selective deposition
2 Jan 24
Exemplary processing methods may include forming a plasma of a silicon-containing precursor.
Bhargav S. Citla, Soham Asrani, Joshua Rubnitz, Srinivas D. Nemani, Ellie Y. Yieh
Filed: 8 Sep 21
Utility
Shutter disk
2 Jan 24
Describes are shutter disks comprising one or more of titanium (Ti), barium (Ba), or cerium (Ce) for physical vapor deposition (PVD) that allows pasting to minimize outgassing and control defects during etching of a substrate.
Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi, Sarath Babu
Filed: 11 Oct 21
Utility
Multiplexing control of multiple positional sensors in device manufacturing machines
2 Jan 24
Implementations disclosed describe an integrated sensor controller comprising a sensor circuit and a logic circuit.
Kiyki-Shiy Shang, Mikhail Taraboukhine, Venkata Raghavaiah Chowdhary Kode
Filed: 19 Aug 20
Utility
Package core assembly and fabrication methods
2 Jan 24
The present disclosure relates to semiconductor core assemblies and methods of forming the same.
Han-Wen Chen, Steven Verhaverbeke, Giback Park, Kyuil Cho, Kurtis Leschkies, Roman Gouk, Chintan Buch, Vincent Dicaprio
Filed: 27 Nov 19
Utility
Live measurement of high voltage power supply output
2 Jan 24
Process chamber, high voltage measurement systems and methods for monitoring the output of a high voltage power supply are described.
Prakash Ravanan
Filed: 26 Mar 21
Utility
Optical Inspection Using Controlled Illumination and Collection Polarization
28 Dec 23
An optical inspection system, including (a) an illumination optics that is configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; (b) at least one collection optics configured to collect light from the sample as a result of an impingement of the illumination light beam on the sample; (c) at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; (d) multiple polarizers that comprise at least one inhomogeneous polarizer and at least one half-wave plate; and (e) at least one movement unit that is configured to move, under a control of a control unit of the optical inspection system, the at least one inhomogeneous polarizer thereby impacting a polarization of one or more light beams out of the illumination light beam, and the at least one detected light beam.
Elad Eizner, Amir Shoham
Filed: 13 Sep 23