7578 patents
Page 6 of 379
Utility
Control of Platen Shape In Chemical Mechanical Polishing
28 Dec 23
A chemical mechanical polishing apparatus includes a platen to support a polishing pad, an actuator, a carrier head to hold a surface of a substrate against the polishing pad, a motor to generate relative motion between the platen and the carrier head so as to polish an overlying layer on the substrate.
Steven M. Zuniga, Jay Gurusamy, Jeonghoon Oh
Filed: 26 Jun 23
Utility
Optical Inspection Using Controlled Illumination and Collection Polarization
28 Dec 23
An optical inspection system, including (a) an illumination optics that is configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; (b) at least one collection optics configured to collect light from the sample as a result of an impingement of the illumination light beam on the sample; (c) at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; (d) multiple polarizers that comprise at least one inhomogeneous polarizer and at least one half-wave plate; and (e) at least one movement unit that is configured to move, under a control of a control unit of the optical inspection system, the at least one inhomogeneous polarizer thereby impacting a polarization of one or more light beams out of the illumination light beam, and the at least one detected light beam.
Elad Eizner, Amir Shoham
Filed: 13 Sep 23
Utility
Apparatus and Method for CMP Temperature Control
28 Dec 23
A chemical mechanical polishing apparatus includes a platen to hold a polishing pad, a carrier to hold a substrate against a polishing surface of the polishing pad during a polishing process, and a temperature control system including a source of a fluid medium and one or more openings positioned over the platen and separated from the polishing pad and configured for the fluid medium to flow onto the polishing pad to heat or cool the polishing pad.
Shou-Sung Chang, Hari Soundararajan, Haosheng Wu, Jianshe Tang
Filed: 18 Aug 23
Utility
Integrated Method and Tool for High Quality Selective Silicon Nitride Deposition
28 Dec 23
Methods of manufacturing memory devices are provided.
Tomohiko Kitajima, Ning Li, Chang Seok Kang, Naomi Yoshida
Filed: 7 Sep 23
Utility
Control of Steam Generation for Chemical Mechanical Polishing
28 Dec 23
A chemical mechanical polishing system includes a steam generator with a heating element to apply heat to a vessel to generate steam, an opening to deliver steam onto a polishing pad, a first valve in a fluid line between the opening and the vessel, a sensor to monitor a steam parameter, and a control system.
Hari Soundararajan, Shou-Sung Chang, Calvin Lee, Jonathan P. Domin, Shuchivrat Datar, Dmitry Sklyar, Paul D. Butterfield, Chad Pollard, Haosheng Wu
Filed: 12 Sep 23
Utility
Processing Chamber with Annealing Mini-environment
28 Dec 23
Apparatus and methods to process one or more wafers are described.
Michael Honan, David Blahnik, Robert Brent Vopat, Jeffrey Blahnik, Charles Carlson
Filed: 8 Sep 23
Utility
Window Logic for Control of Polishing Process
28 Dec 23
A method of controlling a chemical mechanical polishing system includes receiving a respective time-varying test signal from an endpoint detection system for each of a plurality of test substrates, simultaneously visually displaying the plurality of time-varying test signals on a display with the plurality of time-varying test signals overlaid on each other in a graph. receiving user input selecting a box having a defined time range and defined signal value range, and receiving a selection of one from a preset group of boundary crossing logic functions to provide a selected boundary crossing logic function.
Volker Geissler, Benjamin Cherian
Filed: 27 Mar 23
Utility
Substrate Frame Design for Three-dimensional Stacked Electronic Assemblies
28 Dec 23
In order to relieve the stress on the substrates in a 3D stacked electronic assembly, a substrate frame may be divided into a plurality of frame sections that are separated by spaces between the frame sections.
Akash Agrawal, Prashanth Ganeshbaabu
Filed: 28 Jun 22
Utility
Methods and Apparatus for Processing a Substrate
28 Dec 23
Methods and apparatus for processing a substrate are provided herein.
Yaoying ZHONG, Siew Kit HOI, John KLOCKE, Bridger Earl HOERNER
Filed: 28 Jun 22
Utility
Atomic Layer Deposition of High Dielectric Constant Materials
28 Dec 23
Exemplary methods of semiconductor processing may include providing a first precursor to a semiconductor processing chamber.
Geetika Bajaj, Shonal Chouksey, Amit Kumar Roy, Darshan Thakare, Seshadri Ganguli, Gopi Chandran Ramachandran, Srinivas Gandikota, Jayeeta Sen
Filed: 12 Jun 23
Utility
Method for Formation of Conformal Ald SIO2 Films
28 Dec 23
Embodiments of the disclosure provide a method of forming a dielectric film in trenches of a substrate.
Geetika BAJAJ, Seshadri GANGULI, Gopi Chandran RAMACHANDRAN, Srinivas GANDIKOTA
Filed: 16 Jun 23
Utility
Dynamic Multi Zone Flow Control for a Processing System
28 Dec 23
In one example, a process chamber comprises a lid assembly, a first gas supply, second gas supply, a chamber body, and a substrate support.
Daemian Raj BENJAMIN RAJ, Gregory Eugene CHICHKANOFF, Shailendra SRIVASTAVA, Sai Susmita ADDEPALLI, Nikhil Sudhindrarao JORAPUR, Abhigyan KESHRI, Allison YAU
Filed: 11 Sep 23
Utility
Selective Etch of a Substrate
28 Dec 23
Described herein is a method for selectively cleaning and/or etching a sample.
David Thompson, Bhaskar Jyoti Bhuyan, Mark Saly, Lisa Enman, Aaron Dangerfield, Jesus Candelario Mendoza, Jeffrey W. Anthis, Lakmal Kalutarage
Filed: 9 Jun 22
Utility
Substrate Transfer Mechanism to Reduce Back-side Substrate Contact
28 Dec 23
A substrate processing system is disclosed which includes a processing chamber comprising a susceptor having a first surface and a second surface opposite to the first surface, a groove formed in the first surface adjacent to a perimeter thereof, and a substrate support structure including a plurality of carrier lift pins, each of the plurality of carrier lift pins movably disposed in an opening formed from the second surface to the first surface, wherein the opening is recessed from the groove.
Masato ISHII, Richard O. COLLINS, Richard GILJUM, Alexander BERGER
Filed: 11 Sep 23
Utility
Treatment of Tungsten Surface for Tungsten Gap-fill
28 Dec 23
A method and apparatus for tungsten gap-fill in semiconductor devices are provided.
Tsung-Han YANG, Xingyao GAO, Shiyu YUE, Chih-Hsun HSU, Shirish PETHE, Rongjun WANG, Yi XU, Wei LEI, Yu LEI, Aixi ZHANG, Xianyuan ZHAO, Zhimin QI, Jiang LU, Xianmin TANG
Filed: 11 Apr 23
Utility
Examination of a Hole Formed In a Semiconductor Specimen
28 Dec 23
Rafael BISTRITZER, Vadim VERESCHAGIN, Grigory KLEBANOV, Roman KRIS, Ilan BEN-HARUSH, Omer KEREM, Asaf GOLOV, Elad SOMMER
Filed: 23 Jun 22
Utility
Graded Superlattice Structure for Gate All around Devices
28 Dec 23
Silicon germanium (SiGe)/silicon containing superlattice structure and methods for forming the same are provided.
Yi-Chiau HUANG, Pierre TOMASINI, Abhishek Dube
Filed: 17 Jan 23
Utility
Light Source System and Method
28 Dec 23
A light source system is disclosed, the system comprises: a multimode laser unit; a first lenslet array positioned in a path of said laser beam and configured to form an array of focused spots in a selected plane downstream of said first lenslet array; a spatial filter mask carrying an array of pinholes positioned in said selected plane; a second lenslet array having spatial arrangement of lenslets similar to the first lenslet array and positioned such that said spatial filter mask is in a back focal plane of said second lenslet array, thereby collimating laser light from the array of focused spots into a corresponding array of beamlets; and a third lenslet array positioned downstream of said second lenslet array, configured for focusing said array of beamlets to form an output spot array at an exit pupil of said light source system.
Haim FELDMAN
Filed: 27 Jun 22
Utility
Process Recipe Creation and Matching Using Feature Models
28 Dec 23
A method includes determining, by a processing device, whether a first process recipe including a set of Pareto efficient parameters is to be selected from a set of process recipes, wherein the set of Pareto efficient parameters fail to satisfy each target property of a set of target properties for processing the component, in response to determining that a first process recipe is not to be selected from a set of process recipes for processing the component, selecting, by the processing device from the set of process recipes, a second process recipe including a set of parameters satisfying each target property of the set of target properties, and causing, by the processing device, the component to be processed by a process tool using the second process recipe.
Dermot P. Cantwell, Taehun Kim
Filed: 8 Sep 23
Utility
Reconstruction of a Distorted Image of an Array of Structural Elements of a Specimen
28 Dec 23
There is provided a method and a system configured to compensate for image distortions.
Yehuda Cohen, Rafael Bistritzer
Filed: 12 Sep 23