64 patents
Design
Collimator for a physical vapor deposition chamber
2 Jan 24
Martin Lee Riker, Keith A. Miller, Fuhong Zhang, Luke Vianney Varkey, Kishor Kumar Kalathiparambil, Xiangjin Xie
Filed: 29 Aug 21
Design
Shadow ring lift pin
2 Jan 24
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh, Manjunatha Koppa
Filed: 28 Sep 21
Design
Target profile for a physical vapor deposition chamber target
12 Dec 23
David Gunther, Kirankumar Neelasandra Savandaiah, Jiao Song, Madan Kumar Shimoga Mylarappa, Yue Cui, Nuno Yen-Chu Chen, Mengxue Wu
Filed: 7 May 21
Design
Collimator for use in a physical vapor deposition (PVD) chamber
12 Sep 23
Martin Lee Riker, Fuhong Zhang, Lanlan Zhong, Kishor Kumar Kalathiparambil
Filed: 7 Apr 20
Design
Shadow ring lift plate
5 Sep 23
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh, Manjunatha Koppa
Filed: 28 Sep 21
Design
Shadow ring lift assembly
5 Sep 23
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh, Manjunatha Koppa
Filed: 28 Sep 21
Design
Live streaming camera
22 Aug 23
Philip Worthington, Jimmy An, Maxime Haot
Filed: 7 Dec 20
Design
Mainframe of substrate processing system
18 Jul 23
Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir
Filed: 8 Nov 22
Design
Mainframe of substrate processing system
11 Jul 23
Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir
Filed: 8 Nov 22
Design
Confinement plate for a substrate processing chamber
16 May 23
Joseph Perry
Filed: 24 Jan 22
Design
Packaging insert for a process chamber component
2 May 23
Joseph Frederick Behnke, Trevor Wilantewicz, Christopher Laurent Beaudry, Timothy Douglas Toth, Scott Osterman
Filed: 22 Dec 20
Design
Lift pin
14 Mar 23
Eric J. Hoffmann
Filed: 2 Mar 21
Design
Substrate processing system carrier
7 Mar 23
Aaron Green, Nicholas Michael Bergantz
Filed: 2 Jun 20
Design
Confinement liner for a substrate processing chamber
28 Feb 23
Joseph Perry
Filed: 19 Mar 20
Design
Portion of a display panel with a graphical user interface
7 Feb 23
Upendra V. Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu
Filed: 22 Jul 20
Design
Upper shield with showerhead for a process chamber
27 Dec 22
Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Tai Ming Boh, Kang Zhang, Yuichi Wada
Filed: 22 Apr 20
Design
Mainframe of substrate processing system
27 Dec 22
Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir
Filed: 17 Nov 20
Design
Mainframe of substrate processing system
20 Dec 22
Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir
Filed: 17 Nov 20
Design
Lower shield for a substrate processing chamber
29 Nov 22
Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada, Kang Zhang
Filed: 10 Apr 21
Design
Sputter target for a physical vapor deposition chamber
22 Nov 22
Martin Riker, William Fruchterman, Ilya Lavitsky, Srinivasa Rao Yedla, Kirankumar Neelasandra Savandaiah
Filed: 26 Oct 21