64 patents
Page 2 of 4
Design
Deposition chamber showerhead
15 Nov 22
Alexander N. Lerner, Graeme Jamieson Scott, Prashanth Kothnur
Filed: 20 Oct 20
Design
Microwave transmission window assembly
18 Oct 22
Rajesh Kumar Putti, Prashant Agarwal, Ananthkrishna Jupudi
Filed: 30 Oct 20
Design
Showerhead reflector
18 Oct 22
Alexander N. Lerner, Graeme Jamieson Scott, Prashanth Kothnur
Filed: 20 Oct 20
Design
Target profile for a physical vapor deposition chamber target
11 Oct 22
David Gunther, Jiao Song, Kirankumar Neelasandra Savandaiah, Madan Kumar Shimoga Mylarappa
Filed: 31 Dec 21
Design
Base plate for a processing chamber substrate support
9 Aug 22
Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Matthew Tsai, Manjunatha P. Koppa, Steven V. Sansoni
Filed: 11 Mar 22
Design
Display screen or portion thereof with graphical user interface
2 Aug 22
Kartik Bhupendra Shah, Kartik Santhanam, Bindusagar Marath Sankarathodi, Abhilash J. Mayur, Dayal Ramachandran, Amritha Rammohan, Stephen Moffatt, Eugene Lobanov
Filed: 7 Oct 20
Design
Compression fitting
2 Aug 22
Muhannad Mustafa, Muhammad M. Rasheed
Filed: 24 Jun 20
Design
Enclosure system shelf
14 Jun 22
Aaron Green, Nicholas Michael Bergantz
Filed: 2 Jun 20
Design
Replaceable substrate carrier interfacing film
5 Apr 22
Clinton Sakata, Edward Golubovsky
Filed: 20 May 20
Design
Base plate for a processing chamber substrate support
5 Apr 22
Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Matthew Tsai, Manjunatha P. Koppa, Steven V. Sansoni
Filed: 23 Nov 20
Design
Radio frequency conduit
22 Mar 22
Adam Fischbach, Kien N. Chuc, Canfeng Lai, Carlaton Wong
Filed: 25 Oct 19
Design
Target profile for a physical vapor deposition chamber target
22 Mar 22
Martin Lee Riker, Fuhong Zhang, Zheng Wang
Filed: 25 Nov 19
Design
Confinement plate for a substrate processing chamber
15 Feb 22
Joseph Perry
Filed: 19 Mar 20
Design
Process shield for a substrate processing chamber
1 Feb 22
Manjunatha P. Koppa, Aravind Kamath, Cheng-Hsiung Matt Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David Or
Filed: 8 Feb 19
Design
Substrate transfer blade
25 Jan 22
Sultan Malik, Srinivas D. Nemani, Adib M. Khan, Qiwei Liang
Filed: 3 Mar 20
Design
Process shield for a substrate processing chamber
18 Jan 22
Ilya Lavitsky, Keith A Miller, Goichi Yoshidome
Filed: 20 Mar 20
Design
Process shield for a substrate processing chamber
18 Jan 22
Ilya Lavitsky, Keith A Miller, Goichi Yoshidome
Filed: 20 Mar 20
Design
Target profile for a physical vapor deposition chamber target
11 Jan 22
David Gunther, Jiao Song, Kirankumar Neelasandra Savandaiah, Madan Kumar Shimoga Mylarappa
Filed: 2 Dec 20
Design
Substrate transfer structure
14 Dec 21
Jason M. Schaller, Benjamin Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka, Jeffrey Hudgens, Paul Z. Wirth, Charles T. Carlson, Siva Chandrasekar, Michael Carrell, Venkata Raghavaiah Chowdhary Kode, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez
Filed: 25 Oct 19
Design
Sputter target for a physical vapor deposition chamber
30 Nov 21
Martin Riker, William Fruchterman, Ilya Lavitsky, Srinivasa Rao Yedla, Kirankumar Neelasandra Savandaiah
Filed: 23 Mar 20