12 patents
Utility
Low Intensity Photomask and System, Method and Program Product for Making Low Intensity Photomask for Use In Flat Panel Display Lithography
28 Sep 23
A method of manufacturing a photomask including the steps of receiving initial photomask design data associated with one or more patterns to be formed on a photomask and optimizing the initial photomask design data to minimize printing exposure energy while maintaining an acceptable pattern quality and size.
Christopher Progler, Young Mog Ham
Filed: 20 Mar 23
Utility
System, Method and Program Product for Photomask Surface Treatment
28 Sep 23
A method of manufacturing a photomask including the steps of providing a photomask blank, inspecting the photomask blank to determine presence of one or more defects in the photomask blank, wherein the one or more defects comprise one or more photomask substrate defects, and compensating for the one or more photomask substrate defects by roughening one or more surface portions of the photomask substrate.
Christopher Progler, Young Mog Ham
Filed: 20 Mar 23
Utility
Pellicle Removal Tool
31 Aug 23
A pellicle removal tool including a stage that holds a photomask and an associated pellicle, two or more arms positioned around the stage and configured to engage pellicle side wells of the pellicle, and two or more actuators each configured to adjust at least a vertical position of a corresponding one of the two or more arms so as to apply a lifting force to the pellicle for removal of the pellicle from the photomask.
Hilario Ar-Miguel Alvarez, Spencer Allen Mullens, Jesse Eugene Williams, II
Filed: 8 May 23
Utility
System, Method and Program Product for Improving Accuracy of Photomask Based Compensation In Flat Panel Display Lithography
17 Aug 23
A method of manufacturing a photomask including determining based on initial photomask design data a first contour associated with at least one pattern expected to result from writing of the photomask and determining based on the first contour a second contour associated with the at least one pattern expected to result from etching of the written photomask.
Christopher Progler, Young Mog Ham
Filed: 14 Feb 23
Utility
Pellicle for Flat Panel Display Photomask
25 May 23
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
Bryan S. Kasprowicz, Christopher Progler
Filed: 21 Nov 22
Utility
Pellicle for flat panel display photomask
27 Dec 22
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
Bryan S. Kasprowicz, Christopher Progler
Filed: 12 Aug 21
Utility
Pellicle for Flat Panel Display Photomask
16 Dec 21
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
Bryan S. Kasprowicz, Christopher Progler
Filed: 12 Aug 21
Utility
Pellicle Removal Tool
9 Dec 21
A pellicle removal tool including a stage that holds a photomask and an associated pellicle, two or more arms positioned around the stage and configured to engage pellicle side wells of the pellicle, and two or more actuators each configured to adjust at least a vertical position of a corresponding one of the two or more arms so as to apply a lifting force to the pellicle for removal of the pellicle from the photomask.
Hilario Ar-Miguel Alvarez, Spencer Allen Mullens, Jesse Eugene Williams, II
Filed: 30 Jul 21
Utility
Pellicle removal tool
23 Nov 21
A pellicle removal tool including a stage that holds a photomask and an associated pellicle, two or more arms positioned around the stage and configured to engage pellicle side wells of the pellicle, and two or more actuators each configured to adjust at least a vertical position of a corresponding one of the two or more arms so as to apply a lifting force to the pellicle for removal of the pellicle from the photomask.
Hilario Ar-Miguel Alvarez, Spencer Allen Mullens, Jesse Eugene Williams, II
Filed: 24 Apr 18
Utility
System, Method, and Program Product for Manufacturing a Photomask
4 Nov 21
Methods and systems for building a photomask from obtained pattern information relating to a photomask that exhibits defects on wafer.
Mohamed Ramadan, Michael Green, Young Ham, Christopher J. Progler
Filed: 30 Apr 21
Utility
Pellicle for flat panel display photomask
14 Sep 21
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
Bryan S. Kasprowicz, Christopher Progler
Filed: 12 Sep 19
Utility
Pellicle for Flat Panel Display Photomask
11 Mar 20
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
Bryan S. Kasprowicz, Christopher Progler
Filed: 11 Sep 19
- Prev
- 1
- Next
Patents are sorted by USPTO publication date, most recent first