2 patents
Utility
High efficiency rotatable sputter target
28 Nov 23
A rotatable sputtering target is provided for use in a sputtering system having a plurality of hollow sleeves of sputtering material arranged on a hollow e backing tube so as to form an annular space that is occupied by a bonding agent and a thermally conductive element which is a woven metal mesh.
Ian Ravary, Jeremy Young
Filed: 24 Apr 20
Utility
Display having a transparent conductive oxide layer comprising metal doped zinc oxide applied by sputtering
6 Apr 20
The invention provides an alternative liquid crystal and light emitting display which include at least one Transparent Conductive Oxide layers which comprises a zinc oxide doped with a group III, IV, V, or transition metal dopant, and sputtered from a sputtering target.
Robert McGinnis, Jing Yang, Tzu-Chieh Lin
Filed: 13 Feb 18
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