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AEIS Advanced Energy Industries

APP
Utility
Measurement and Adjustment of a Charge of a Workpiece
14 Oct 21
An apparatus, system, and method for managing an electrostatic charge of a workpiece are disclosed.
Donnie Herman
Filed: 23 Jun 21
APP
Utility
Input Impedance Networks with Power Recovery
14 Oct 21
Input impedance networks and associated methods are disclosed.
Gideon Van Zyl
Filed: 13 Apr 21
GRANT
Utility
Method and apparatus for changing the apparent source impedance of a generator
5 Oct 21
Gideon Johannes Jacobus Van Zyl
Filed: 11 Oct 18
APP
Utility
Combination Air-water Cooling Device
30 Sep 21
Heat transfer systems and methods are disclosed.
Jon Danielson
Filed: 31 Mar 20
GRANT
Utility
Power supplies including shielded multilayer power transmission boards
21 Sep 21
A power supply comprises a main circuit board and a multilayer power transmission board electrically coupled to the main circuit board.
Prabou Ranganathan, Norman Oliva
Filed: 24 Sep 20
APP
Utility
Inter-period Control System for Plasma Power Delivery System and Method of Operating the Same
16 Sep 21
A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past.
Gideon Van Zyl
Filed: 28 May 21
APP
Utility
Dual Reverse Pulse Sputtering System
16 Sep 21
Doug Pelleymounter
Filed: 31 May 21
APP
Utility
High Energy Pulse on a High-voltage-direct-current Offset
2 Sep 21
Pulse power supply systems and methods are disclosed.
Donnie Herman
Filed: 14 Apr 21
APP
Utility
Inter-period Control System for Plasma Power Delivery System and Method of Operating Same
12 Aug 21
A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past.
Gideon Van Zyl
Filed: 1 Apr 21
APP
Utility
Spatial Monitoring and Control of Plasma Processing Environments
5 Aug 21
Systems and methods for plasma processing are disclosed.
Daniel Carter, Kevin Fairbairn, Denis Shaw, Victor Brouk
Filed: 9 Feb 21
GRANT
Utility
Temperature measurement system for furnaces
3 Aug 21
A method for measuring furnace temperatures.
Tim Patrick Dubbs, John Leonard Shaver, Kreg James Kelley, Troy M Raybold, Tushar Vispute
Filed: 26 Mar 19
GRANT
Utility
System and method to measure and adjust a charge of a workpiece
27 Jul 21
An apparatus and method for managing an electrostatic charge of a workpiece are disclosed.
Donnie Herman
Filed: 23 May 19
APP
Utility
Integrated Control of a Plasma Processing System
1 Jul 21
Plasma processing systems and power delivery methods are disclosed.
Gideon Van Zyl, Thomas Joel Blackburn, Thomas McIntyre, Fernando Gustavo Tomasel
Filed: 22 Feb 21
GRANT
Utility
Rate enhanced pulsed DC sputtering system
29 Jun 21
A sputtering system and method are disclosed.
Doug Pelleymounter
Filed: 15 Dec 17
APP
Utility
Frequency Tuning for Modulated Plasma Systems
10 Jun 21
Plasma processing and power supply systems and methods are disclosed.
Gideon Van Zyl
Filed: 17 Feb 21
APP
Utility
Inter-period Control for Passive Power Distribution of Multiple Electrode Inductive Plasma Source
3 Jun 21
A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past.
Gideon Van Zyl
Filed: 12 Feb 21
APP
Utility
Resonant Converter Having Multiple Transformers and a Parallel Inductor
20 May 21
The invention provides a series resonant LLC power converter unit to provide a plurality of power outputs.
Jonathan James Wilkinson, Diarmuid Hogan
Filed: 31 Jan 21
APP
Utility
Precision Digital to Analog Conversion In the Presence of Variable and Uncertain Fractional Bit Contributions
20 May 21
This disclosure describes systems, methods, and apparatus for a digital-to-analog (DAC) converter, that can be part of a variable capacitor and/or a match network.
Gideon Van Zyl
Filed: 29 Jan 21
GRANT
Utility
High energy pulse on a high-voltage-direct-current offset
18 May 21
Pulse power supply systems and methods are disclosed.
Donnie Herman
Filed: 2 Aug 19
GRANT
Utility
System, method, and apparatus for controlling ion energy distribution in plasma processing systems
18 May 21
Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed.
Victor Brouk, Daniel J. Hoffman, Daniel Carter
Filed: 2 Aug 17
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