143 patents
Page 3 of 8
Utility
Robust Tensorized Shaped Setpoint Waveform Streaming Control
27 Apr 23
Various illustrative aspects are directed to a system.
Chad S. Samuels
Filed: 25 Oct 21
Utility
Wafer Chucking Monitor
27 Apr 23
This disclosure describes systems, methods, and apparatus for non-invasive wafer chuck monitoring using a low voltage AC signal injected into a high voltage DC chucking voltage provided to a wafer chuck.
Peter Match, Carlos Alicea
Filed: 22 Dec 22
Utility
Spatial Control of Plasma Processing Environments
13 Apr 23
Systems and methods for plasma processing are disclosed.
Daniel Carter, Kevin Fairbairn, Denis Shaw, Victor Brouk
Filed: 5 Sep 22
Utility
Reduced Ripple In Switch Mode Power Supply with Snubber
6 Apr 23
This disclosure describes systems, methods, and apparatus for reducing ripple in a pulsed waveform power generation system, often for use providing power to a plasma processing chamber.
Mike Armstrong
Filed: 1 Oct 21
Utility
Dynamic Control-setpoint Modification
6 Apr 23
A generator and a method for controlling the generator are disclosed.
Chad S. Samuels
Filed: 5 Oct 21
Utility
Apparatus and System for Modulated Plasma Systems
23 Mar 23
Plasma processing systems and methods are disclosed.
Gideon Van Zyl
Filed: 26 Oct 22
Utility
Controller Design Using Stability Region
23 Mar 23
This disclosure describes systems, methods, and apparatus for designing and using an H˜ controller.
Chad S. Samuels, Peter Young
Filed: 23 Sep 21
Utility
Model Reference Adaptive Control with Signum Projection Tensor Operations
16 Mar 23
An example device comprises a reference model module, an adaptation law module, and an adaptive control module.
Chad S. Samuels
Filed: 13 Sep 21
Utility
Control of Rail Voltage In Multi-level Pulsing RF Power Amplifier
9 Mar 23
This disclosure describes systems, methods, and apparatus for generating a multi-level pulsed waveform using a DC section and a power amplifier.
Chad S. Samuels
Filed: 7 Sep 21
Utility
Simplified Voltage-boosting Snubber Network
2 Mar 23
This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load's impedance rises rapidly.
Faleh Alskran, John Dorrenbacher
Filed: 26 Aug 21
Utility
Configurable Bias Supply with Bidirectional Switch
16 Feb 23
Bias supplies, plasma processing systems, and associated methods are disclosed.
Hien Minh Nguyen
Filed: 13 Aug 21
Utility
Inductor Current Reconstruction
19 Jan 23
In the parallel operation of power supply units, a high line ripple current may be observed in output when the power supply units (PSUs) are supplied with different inputs.
Brendan Barry
Filed: 12 Jul 21
Utility
Optical Temperature Sensor with Monolithic Crystalline Phosphor
12 Jan 23
A plasma processing chamber optical temperature sensor is disclosed.
Jason Errett, Terry Stapleton
Filed: 8 Jul 21
Utility
Variable Inductor for Plasma Generator
5 Jan 23
This disclosure describes systems, methods, and apparatus for waveform control, comprising: a power supply having an input terminal, and at least one output terminal for coupling to a load; a controller; a variable inductor coupled to at least one of the output terminals, the variable inductor comprising a first magnetic core having a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm; and a DC current source coupled to the first control arm and the controller, the controller configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal.
Fabio Vicinanza
Filed: 1 Jul 21
Utility
Voltage Converter with Feedback Using Variable Proportional Gain
8 Dec 22
A voltage converter comprises a drive control circuit configured to generate switch control signals and a feedback circuit.
Dragan Maksimovic, Faleh Alskran, V. Inder Kumar, Chandan Suthar
Filed: 3 Jun 22
Utility
Bus Bar Assembly
1 Dec 22
A bus bar assembly comprises a first bus bar and a second bus bar.
Angelito Hatol, Romano Iniego
Filed: 31 May 21
Utility
Combining the Determination of Single and Mutual, Preset Preserving, Impedance Loads with Advances In Single and Double Sensor Calibration Techniques In the Application of Single and Pairwise Calibration of Sensors
24 Nov 22
This disclosure describes systems, methods, and apparatus for calibrating sensors used by a match network during tuning of power delivery to a plasma processing chamber.
Frederick Winter
Filed: 26 Apr 21
Utility
Reduced Current Sharing Ripple
17 Nov 22
In the parallel operation of power supply units, a high line ripple current may be observed in output when the power supply units (PSUs) are supplied with different inputs.
Zhizhi Li, Ka Kit Li, Chung Hang Ling, Hing Hei Tsang, Chi Chung Wong, Shu Yuen Chow
Filed: 15 May 21
Utility
System and Method for Improved Electrostatic Chuck Clamping Performance
17 Nov 22
A power supply comprises at least one waveform generator that produces a clamp waveform responsive to a clamp signal, and at least one amplifier that amplifies and provides the clamp waveform to an electrostatic chuck.
Donnie Herman
Filed: 28 Apr 21
Utility
Phase Current Balancing for Multiphase Coupled Inductor Converter
3 Nov 22
This disclosure describes systems, methods, and apparatus for reducing current imbalances between phases in a multi-phase converter as well as reducing instances of particular phases switching twice within a single pulse-width modulated cycle, or other time period.
Daryl Frost
Filed: 3 May 21