143 patents
Page 5 of 8
Utility
Match Efficiency-variation Compensation
9 Jun 22
This disclosure describes systems, methods, and apparatus for identifying and compensating for variances between match networks.
Denis Shaw, Holger Philipp Kley, Suryan Emani, Gideon Van Zyl
Filed: 11 Nov 21
Utility
Coated-substrate Sensing and Crazing Mitigation
12 May 22
Substrate coating systems and methods are disclosed.
Craig Rappe
Filed: 23 Sep 21
Utility
Systems and Methods Combining Match Networks and Frequency Tuning
5 May 22
A power system for a plasma processing system and associated methods are disclosed.
Denis Shaw, Myeong Yeol Choi
Filed: 26 Oct 21
Utility
Fiber Optic Temperature Probe
28 Apr 22
A fiber optic temperature probe is disclosed.
Terry Stapleton, Jason Errett
Filed: 28 Oct 20
Utility
Mechanical and Electrical Connection Clamp
14 Apr 22
A connection clamp assembly and an electrical system including a connection clamp assembly are disclosed.
Jon Danielson, Courtney Crandell, Michael Shover, Steven Lawless
Filed: 5 Oct 21
Utility
Alternating Current (AC) Dual Magnetron Sputtering
24 Mar 22
Power systems, sputtering systems, and sputtering methods are disclosed.
Paul Romanus, Matthew James Lacy, Douglas R. Pelleymounter
Filed: 31 Oct 20
Utility
Method and Apparatus for Emulating a Reactive Source Impedance of a Generator
17 Mar 22
A method for emulating a reactive source impedance for a generator connected to a load.
Gideon Johannes Jacobus Van Zyl
Filed: 25 Aug 21
Utility
Control Circuit for a Power Converter
3 Mar 22
The invention provides a control circuit for controlling the operation of a power converter having a switch connected to an output of the power converter, said control circuit comprising a first amplifier for sensing an output voltage of the power converter and a second amplifier configured to derive a frequency compensated error signal output, to provide a frequency control compensation loop to an input of the power converter and the output of the second amplifier is connected to the switch of the power converter.
Richard Morrison, Jonathan James Wilkinson, Phelim Bradley
Filed: 11 Nov 21
Utility
Uart Transmissions with Two Start Bits for Automatic Baud Detection and Reduced Clock Skew
24 Feb 22
This disclosure describes systems, methods, and apparatus for automatically determining an asynchronous serial data transmission rate at the hardware level of UART devices.
Phelim Seamus Bradley
Filed: 21 Aug 20
Utility
Heat Transfer System for Electronic Enclosures
10 Feb 22
Heat transfer systems and methods are disclosed.
Jon Danielson
Filed: 25 Oct 21
Utility
Event Monitoring and Characterization
18 Nov 21
A system, method and software for generating and receiving information about the AC, DC, RF, voltage, and other characteristics and information provided by components in a system.
Andrew Merton, Jeffrey Harrell, Brian D. Kowal
Filed: 12 May 21
Utility
Surface Charge and Power Feedback and Control Using a Switch Mode Bias System
11 Nov 21
Systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface.
Daniel Carter
Filed: 11 May 20
Utility
Programmable Ignition Profiles for Enhanced Plasma Ignition
4 Nov 21
Generators and methods for igniting a plasma in a plasma chamber are disclosed.
Mike Armstrong, John Accardo, Daryl Frost
Filed: 29 Apr 20
Utility
System, Method, and Apparatus for Ion Current Compensation
21 Oct 21
Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed.
Daniel Carter, Daniel J. Hoffman, Victor Brouk
Filed: 30 Apr 21
Utility
Measurement and Adjustment of a Charge of a Workpiece
14 Oct 21
An apparatus, system, and method for managing an electrostatic charge of a workpiece are disclosed.
Donnie Herman
Filed: 23 Jun 21
Utility
Input Impedance Networks with Power Recovery
14 Oct 21
Input impedance networks and associated methods are disclosed.
Gideon Van Zyl
Filed: 13 Apr 21
Utility
Combination Air-water Cooling Device
30 Sep 21
Heat transfer systems and methods are disclosed.
Jon Danielson
Filed: 31 Mar 20
Utility
Inter-period Control System for Plasma Power Delivery System and Method of Operating the Same
16 Sep 21
A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past.
Gideon Van Zyl
Filed: 28 May 21
Utility
Dual Reverse Pulse Sputtering System
16 Sep 21
Doug Pelleymounter
Filed: 31 May 21
Utility
High Energy Pulse on a High-voltage-direct-current Offset
2 Sep 21
Pulse power supply systems and methods are disclosed.
Donnie Herman
Filed: 14 Apr 21