164 patents
Page 8 of 9
Utility
Sealed Robot Drive
26 Feb 20
A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
Jairo T. MOURA, Ulysses GILCHRIST, Robert T. CAVENEY
Filed: 4 Nov 19
Utility
Method and apparatus for brushless electrical machine control
17 Feb 20
A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
Jairo T. Moura, Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy
Filed: 12 Nov 14
Utility
Tool Compiler
12 Feb 20
Automatic generation of documentation and software for an equipment or tool, together with an automatic synchronization between the corresponding documentation and software can be preformed with a tool model representation.
Francois TANGUY, Andreas DECKER
Filed: 21 Oct 19
Utility
Semiconductor Stocker Systems and Methods
12 Feb 20
In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers.
Lutz REBSTOCK
Filed: 21 Oct 19
Utility
Transport apparatus
10 Feb 20
A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.
Ulysses Gilchrist, Jairo Terra Moura
Filed: 26 Nov 18
Utility
Method for Cleaning a Synthetic Surface
5 Feb 20
The invention relates to a method for cleaning a synthetic surface, in particular to remove metal dirt and/or particles therefrom, said method being characterized by the following steps: a) the synthetic surface is rinsed with deionized water; b) the synthetic surface is rinsed with electrolyzed water; and c) the synthetic surface is rinsed with deionized water.
Lutz REBSTOCK, Matthias FRYDA, Thorsten MATTHÉE
Filed: 23 May 17
Utility
Load lock fast pump vent
20 Jan 20
A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position.
Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, Joseph Kraus, William Fosnight, Craig J. Carbone, Jeffrey C. Blahnik, Ho Yin Owen Fong
Filed: 23 Oct 16
Utility
Access arbitration system for semiconductor fabrication equipment and methods for using and operating the same
13 Jan 20
An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component.
Pablo Gonzalez, Gary Roy Watts
Filed: 30 Oct 14
Utility
Container storage add-on for bare workpiece stocker
6 Jan 20
The present invention relates to apparatuses and methods to store and transfer objects, and more particularly to workpiece stocker configurations such as stocker for semiconductor wafers, reticles or carrier boxes.
Lutz Rebstock
Filed: 13 Oct 14
Utility
Substrate Processing Apparatus
1 Jan 20
A substrate processing apparatus includes a frame and a transport apparatus connected to the frame.
Christopher A. Bussiere, Robert T. Caveney
Filed: 29 May 19
Utility
Unequal Link Scara Arm
1 Jan 20
A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder.
Robert T. Caveney, David Martin, Ulysses Gilchrist
Filed: 9 Sep 19
Utility
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
1 Jan 20
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
Christopher Hofmeister, Alexander G. Krupyshev, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy
Filed: 1 Jul 19
Utility
A Capping And De-Capping Apparatus And A Method Of Operating Such An Apparatus
11 Dec 19
A capping and de-capping apparatus (100) for capping and de-capping tubes (112) disposed in a tube holding rack (111) having a two-dimensional array of apertures (114) for holding the tubes (112).
Lars Weber Hovendahl, Michael Nielsen, Stig Christensen
Filed: 4 Feb 18
Utility
Tool Auto-teach Method and Apparatus
4 Dec 19
A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
Jairo T. MOURA, Aaron GAWLIK, Reza SAEIDPOURAZAR
Filed: 12 Aug 19
Utility
Sample storage and retrieval system
2 Dec 19
A sample storage including a frame and an array of sample container holding areas disposed within the frame where a spacing between adjacent sample container holding areas is independent of a gripping area for sample containers held by the sample storage.
Etienne Croquette, Rhett Affleck, Robin Grimwood
Filed: 26 Mar 15
Utility
Compact direct drive spindle
2 Dec 19
A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section.
Robert T. Caveney
Filed: 4 Sep 17
Utility
Test Tube Capping And De-Capping Apparatus
27 Nov 19
An apparatus (100) for automated capping and de-capping of test tubes (112) having an ejector pin (230) system for individualized cap (113) ejection.
Stig Christensen, Lars Hovendahl, Michael Gabs Kaagaard Nielsen
Filed: 25 Feb 19
Utility
Scalable motion control system
25 Nov 19
A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller.
Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
Filed: 27 Apr 15
Utility
Automated sample storage system having storage consumable with sub-optimal storage density
18 Nov 19
An automated sample specimen storage system including a tube holding microplate including a plate frame, a predetermined array of tube holding receptacles formed in the plate frame, the receptacles having a SBS standard pitch corresponding to the predetermined array, and being configured for holding therein sample store and transport tubes, each disposed so as to contain sample specimen in a sample storage of the storage system and to effect, with the sample tube, delivery from the sample storage to a workstation, the predetermined array of receptacles defining a volume capacity of the tube holding microplate, and each of the receptacles being shaped to conformally engage walls of the sample tubes and hold a respective one of the sample store and transport tubes, wherein the receptacles are arranged so that the tube holding microplate volume capacity defined by the predetermined array is an under optimum volume capacity.
Etienne Croquette, Robin Grimwood, David Andrew Harding, Chris Walsh
Filed: 18 Jan 17
Utility
Sealed robot drive
4 Nov 19
A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
Jairo T. Moura, Ulysses Gilchrist, Robert T. Caveney
Filed: 12 Apr 18