11 results
S-3ASR
EX-4.1
ACLS
Axcelis Technologies Inc
3 Aug 23
Automatic shelf registration
3:14pm
S-3ASR
EX-4.1
ACLS
Axcelis Technologies Inc
29 May 20
Automatic shelf registration
12:14pm
10-K
2019 FY
EX-4.4
ACLS
Axcelis Technologies Inc
Annual report
2 Mar 20
2:08pm
S-3
EX-4.1
ACLS
Axcelis Technologies Inc
Shelf registration
7 Apr 17
12:00am
S-3
EX-4.1
ACLS
Axcelis Technologies Inc
Shelf registration
25 Nov 13
12:00am
8-K
EX-4
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4 May 06
Entry into a Material Definitive Agreement
12:00am
8-K
EX-4.1
a2flze40h8neklo9
15 Jan 02
Other events
12:00am
8-K
EX-4.2
t955 wskf
15 Jan 02
Other events
12:00am
S-1/A
EX-4.2
x770ff5bmrv
15 Jun 00
IPO registration (amended)
12:00am
S-1/A
EX-4.1
ou5bxs0ocnuik562sw
15 Jun 00
IPO registration (amended)
12:00am
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